Nonlocal power deposition in inductively coupled plasmas.
Radiofrequency (rf) plasmas exhibit field penetration well beyond the classical skin depth. Two physical explanations are proposed. First, by tracing orbits of electrons through many rf cycles in a cylindrical system, it is shown that numerous ionizing electrons can reach the interior. Second, current-carrying electrons can form a long-lived torus that drifts toward the axis, causing frequently observed interference phenomena. The pressure dependence of this effect does not agree with collisionless theories of anomalous skin effect, but is consistent with the proposed mechanism.
Evans
J D
JD
Electrical Engineering Department, University of California, Los Angeles, Los Angeles, California 90095-1594, USA. jdevans@ucla.edu
Chen
F F
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