Kinetic simulation model of magnetron discharges.
A self-consistent kinetic model of plasma in the entire gap of a magnetron cylindrical discharge, with all quantities varying in radius and with the uniform magnetic field being directed axially, is presented. The discharge modeling is performed on the basis of a numerical solution of the spatially inhomogeneous Boltzmann kinetic equation together with equations of ion motion, current balance, and Poisson's equation. The model represents an example of discharge description from cathode to anode with respect to strong nonlocality effects in the distribution function formation. Based on the results for a typical magnetron discharge condition, the distribution functions, field, and macroscopic properties calculated for the entire discharge in argon, are presented and discussed.
Porokhova
I A
IA
Ernst-Moritz-Arndt-University Greifswald, Domstrasse 10A, 17487 Greifswald, Germany.
Golubovskii
Y B
YB
Bretagne
J
J
Tichy
M
M
Behnke
J F
JF