title: Three-dimensional STEM for observing nanostructures.
abstract: A new scanning transmission electron microscope has been developed for three-dimensional (3D) observations of nanostructures. Using double spherical fulcra, accurate eucentric rotation was achieved. Cylindrical specimens for 3D-observation were prepared by a microsampling technique using a focused ion beam. Copper via-holes of a semiconductor memory device and ZnO particles were observed by the 3D-STEM from different directions, and 3D-data of the ZnO particles were successfully reconstructed in a topography mode.
authors.affiliation: Central Research Laboratory, Hitachi Ltd, Kokubunji, Tokyo, Japan. Masanari-crl.Koguchi@c-net3.crl.hitachi.co.jp
authors.forename: M
authors.initials: M
authors.lastname: Koguchi
authors.forename: H
authors.initials: H
authors.lastname: Kakibayashi
authors.forename: R
authors.initials: R
authors.lastname: Tsuneta
authors.forename: M
authors.initials: M
authors.lastname: Yamaoka
authors.forename: T
authors.initials: T
authors.lastname: Niino
authors.forename: N
authors.initials: N
authors.lastname: Tanaka
authors.forename: K
authors.initials: K
authors.lastname: Kase
authors.forename: M
authors.initials: M
authors.lastname: Iwaki