Alloying effects on electromigration mass transport.
Small amounts of alloying elements can significantly retard electromigration in conductor lines. This phenomenon is experimentally well established but is still lacking a fundamental explanation. An atomic-level mechanism for this behavior is proposed here which is based on a kinetic analysis of diffusion in crystalline interfaces. It predicts a reduction or reversal of the flux of host atoms for physically reasonable parameters and can account for the observed effect of copper on electromigration in aluminum conductor lines.
Dekker
J P
JP
Max-Planck-Institut für Metallforschung, Seestrasse 92, D-70174 Stuttgart, Germany.
Volkert
C A
CA
Arzt
E
E
Gumbsch
P
P