Three-dimensional STEM for observing nanostructures.
A new scanning transmission electron microscope has been developed for three-dimensional (3D) observations of nanostructures. Using double spherical fulcra, accurate eucentric rotation was achieved. Cylindrical specimens for 3D-observation were prepared by a microsampling technique using a focused ion beam. Copper via-holes of a semiconductor memory device and ZnO particles were observed by the 3D-STEM from different directions, and 3D-data of the ZnO particles were successfully reconstructed in a topography mode.
Koguchi
M
M
Central Research Laboratory, Hitachi Ltd, Kokubunji, Tokyo, Japan. Masanari-crl.Koguchi@c-net3.crl.hitachi.co.jp
Kakibayashi
H
H
Tsuneta
R
R
Yamaoka
M
M
Niino
T
T
Tanaka
N
N
Kase
K
K
Iwaki
M
M