Mass spectrometry for on-line monitoring of perfluoro compounds using Li+ ion attachment techniques.
Ion attachment mass spectrometry is being developed for continuous measurement of perfluoro compounds (PFCs) found in the atmosphere as a result of semiconductor manufacturing processes. Studies were made on 5 greenhouse gases, CF4, CHF3, C2F6, SF6, and c-C4F8, to develop improved methods for PFC analysis, particularly at levels found in the atmosphere (the parts-per-billion concentration range). The results demonstrate the feasibility of performing real-time measurements of the trace amounts of PFCs encountered in process facilities by generating adduct ions from Li+ ion attachment. The identification and detection of c-C4F8 is described as an example of the utility of this new method.
Fujii
T
T
National Institute for Environmental Studies, Tsukuba, Ibaraki, Japan.
Arulmozhiraja
S
S
Nakamura
M
M
Shiokawa
Y
Y