Longitudinal-bending mode micromotor using multilayer piezoelectric actuator.
Longitudinal-bending mode ultrasonic motors with a diameter of 3 mm were fabricated using stacked multilayer piezoelectric actuators, which were self-developed from hard lead zirconate titanate (PZT) ceramic. A bending vibration was converted from a longitudinal vibration with a longitudinal-bending coupler. The motors could be bidirectionally operated by changing driving frequency. Their starting and braking torque were analyzed based on the transient velocity response. With a load of moment of inertia 2.5 x 10(-7) kgm2, the motor showed a maximum starting torque of 127.5 microNm. The braking torque proved to be a constant independent on the motor's driving conditions and was roughly equivalent to the maximum starting torque achievable with our micromotors.
Yao
K
K
International Center for Actuators and Transducers (ICAT), Materials Research Laboratory, Pennsylvania State University, University Park, PA 16802, USA. k-yao@imre.org.sg
Koc
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B
Uchino
K
K