title: Determination of stoichiometry and concentration of trace elements in thin BaxSr1-xTiO3 perovskite layers.
abstract: This paper describes an analytical procedure for determining the stoichiometry of BaxSr1-xTiO3 perovskite layers using inductively coupled plasma mass spectrometry (ICP-MS). The analytical results of mass spectrometry measurements are compared to those of X-ray fluorescence analysis (XRF). The performance and the limits of solid-state mass spectrometry analytical methods for the surface analysis of thin BaxSr1-xTiO3 perovskite layers sputtered neutral mass spectrometry (SNMS)--are investigated and discussed.
authors.affiliation: Central Department of Analytical Chemistry (ZCH), Research Centre Jülich, Germany. s.becker@fz-juelich.de
authors.forename: J S
authors.initials: JS
authors.lastname: Becker
authors.forename: S F
authors.initials: SF
authors.lastname: Boulyga