Deflection characteristics of a trapezoidal multilayer in-plane bending piezoelectric actuator.
A novel multilayer split-morph actuator has been designed and fabricated using the thick film screen-printing technology. Deflection characteristics of the split-morph actuator have been investigated by theoretical analysis and experimental measurement. The results indicate that the tip displacement is inversely proportional to the thickness of each piezoelectric layer, but is independent of the number of layers and the total thickness of the actuator. The displacement/voltage sensitivity of the trapezoidal actuator is larger than that of the rectangular design, assuming both have the same width of clamped end and the same thickness of the piezoelectric layers. The maximum displacement/voltage sensitivity of 0.157 micron/V was obtained with a split-morph actuator with 30-micron thick layers. The proposed actuator is a promising candidate for the secondary fine-tuning actuator of a dual stage head-positioning servo system in high density hard disk drives.
Wang
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Z
Microelectronics Center, School of Electrical and Electronic Engineering, Nanyang Technological University, Singapore 639798. ezhwang@ntu.edu.sg
Zhu
W
W
Zhao
C
C
Yao
X
X