Small blaze angle gratings with various surface treatments for use in the extreme ultraviolet.
Three replica gratings were made from a single master; two were epoxy overcoated with different thicknesses of gold, and one was replicated directly in gold.  Their performance in EUV light at grazing incidence angles was measured and compared.
Miller
A
A
University of California, Space Sciences Laboratory, Berkeley 94720, USA.
Jelinsky
P
P
Bowyer
S
S
Welsh
B Y
BY
D002138:Calibration; D004853:Epoxy Resins; D006046:Gold; D055095:Optics and Photonics; D013056:Spectrophotometry, Ultraviolet / Q000295:instrumentation* / Q000379:methods; D014466:Ultraviolet Rays; D014965:X-Rays
D004853:Epoxy Resins; D006046:Gold