Fourier-transform optical microsystems.
The design, fabrication, and initial characterization of a miniature single-pass Fourier-transform spectrometer (FTS) that has an optical bench that measures 1 cm x 5 cm x 10 cm is presented. The FTS is predicated on the classic Michelson interferometer design with a moving mirror. Precision translation of the mirror is accomplished by microfabrication of dovetailed bearing surfaces along single-crystal planes in silicon. Although it is miniaturized, the FTS maintains a  relatively high spectral resolution, 0.1 cm-1, with adequate optical throughput.
Collins
S D
SD
MicroInstruments and Systems Laboratory, Department of Electrical and Computer Engineering, University of California, Davis 95616, USA. collins@ece.ucdavis.edu
Smith
R L
RL
Gonzalez
C
C
Stewart
K P
KP
Hagopian
J G
JG
Sirota
J M
JM
D004867:Equipment Design; D006371:Helium; D007368:Interferometry; D007834:Lasers; D008904:Miniaturization / Q000379:methods*; D009356:Neon; D055095:Optics and Photonics; D017550:Spectroscopy, Fourier Transform Infrared / Q000295:instrumentation*
D006371:Helium; D009356:Neon