title: Small blaze angle gratings with various surface treatments for use in the extreme ultraviolet.
abstract: Three replica gratings were made from a single master; two were epoxy overcoated with different thicknesses of gold, and one was replicated directly in gold.  Their performance in EUV light at grazing incidence angles was measured and compared.
authors.affiliation: University of California, Space Sciences Laboratory, Berkeley 94720, USA.
authors.forename: A
authors.initials: A
authors.lastname: Miller
authors.forename: P
authors.initials: P
authors.lastname: Jelinsky
authors.forename: S
authors.initials: S
authors.lastname: Bowyer
authors.forename: B Y
authors.initials: BY
authors.lastname: Welsh
mesh_terms: D002138:Calibration; D004853:Epoxy Resins; D006046:Gold; D055095:Optics and Photonics; D013056:Spectrophotometry, Ultraviolet / Q000295:instrumentation* / Q000379:methods; D014466:Ultraviolet Rays; D014965:X-Rays
chemical_list: D004853:Epoxy Resins; D006046:Gold