title: Light collection efficiency and light transport in backscattered electron scintillator detectors in scanning electron microscopy.
abstract: Experimentally, scintillator detectors used in scanning electron microscopy (SEM) to record backscattered electrons (BSE) show a noticeable difference in detection efficiency in different parts of their active zones due to light losses transport in the optical part of the detector. A model is proposed that calculates the local efficiency of the active parts of scintillator detectors of arbitrary shapes. The results of these calculations for various designs are presented.
authors.affiliation: Institute of Microelectronics Technology, Russian Academy of Sciences, Chernogolovka.
authors.forename: M N
authors.initials: MN
authors.lastname: Filippov
authors.forename: E I
authors.initials: EI
authors.lastname: Rau
authors.forename: R A
authors.initials: RA
authors.lastname: Sennov
authors.forename: A
authors.initials: A
authors.lastname: Boyde
authors.forename: P G
authors.initials: PG
authors.lastname: Howell