Light collection efficiency and light transport in backscattered electron scintillator detectors in scanning electron microscopy.
Experimentally, scintillator detectors used in scanning electron microscopy (SEM) to record backscattered electrons (BSE) show a noticeable difference in detection efficiency in different parts of their active zones due to light losses transport in the optical part of the detector. A model is proposed that calculates the local efficiency of the active parts of scintillator detectors of arbitrary shapes. The results of these calculations for various designs are presented.
Filippov
M N
MN
Institute of Microelectronics Technology, Russian Academy of Sciences, Chernogolovka.
Rau
E I
EI
Sennov
R A
RA
Boyde
A
A
Howell
P G
PG