Mapping the ion kinetic energy in a helium microwave plasma orthogonal acceleration time-of-flight mass spectrometer.
The ion kinetic energy of a helium microwave plasma is studied using an orthogonal acceleration time-of-flight mass spectrometer. The ions produced in the plasma are extracted into the mass spectrometer in an 'off-cone' mode (i.e. the helium plasma plume is off the sampler cone), and enter the repelling zone in the x-direction, which is perpendicular to the flight tube. The information of ion initial kinetic energy was obtained from both theoretical calculations and experimental results. The potential influence of two x-direction steering plates (X-steering plates) on the ion energy and signal intensity was examined. The influence of gas composition on the ion kinetic energy was also investigated. The calculated results show that ions with different m/z have different velocity and kinetic energy when they enter the ion modulation zone, and lighter ions have higher velocity and lower kinetic energy. The experimental results obtained demonstrate that the ion signals of different m/z produced with an 'off-cone' sampling helium microwave plasma show similar trends as calculated with the potential difference of the X-steering plates, revealing their narrow kinetic energy distribution in the x-direction. Under typical operating conditions, the x-direction kinetic energy of ions detected mostly range from about 14.9 eV for (7)Li(+) to 16.8 eV for (208)Pb(+).
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Chemistry Division, C-ACS, MS K484, Los Alamos National Laboratory, Los Alamos, NM 87545, USA.
Jin
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Duan
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Olivares
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