title: Characterization of optical diffraction gratings by use of a neural method.
abstract: Optical scatterometry by use of a neural network is now recognized as an efficient method for retrieving dimensions of gratings in semiconductors or glasses. For an on-line control, a small number of measurements and a rapid data treatment are needed. We demonstrate that these requirements can be met by combining data preprocessing and a proper neural learning method. A good accuracy is attainable with the measurement of only a few orders, even in the presence of experimental errors, with a reduction in learning and computing time.
authors.affiliation: Laboratoire Traitement du Signal et Instrumentation, Unité Mixte de Recherche, Centre National de la Recherche Scientifique 5516, Saint-Etienne, France. stephane.robert@univ-st-etienne.fr
authors.forename: Stéphane
authors.initials: S
authors.lastname: Robert
authors.forename: Alain
authors.initials: A
authors.lastname: Mure-Ravaud
authors.forename: Dominique
authors.initials: D
authors.lastname: Lacour