title: Sub-Angstrom high-resolution transmission electron microscopy at 300 keV.
abstract: Sub-Angstrom transmission electron microscopy has been achieved at the National Center for Electron Microscopy (NCEM) by a one-Angstrom microscope (OAM) project using software and enhanced hardware developed within a Brite-Euram project (Ultramicroscopy 64 (1996) 1). The NCEM OAM provides materials scientists with transmission electron microscopy at a resolution better than 1 A by using extensive image reconstruction to exploit the significantly higher information limit of an FEG-TEM over its Scherzer resolution limit. Reconstruction methods chosen used off-axis holograms and focal series of underfocused images. Measured values of coherence parameters predict an information limit of 0.78 A. Images from a [1 1 0] diamond test specimen show that sub-Angstrom resolution of 0.89 A has been achieved with the OAM using focal series reconstruction.
authors.affiliation: Materials Science Division, National Center for Electron Microscopy, Lawrence Berkeley National Laboratory, Berkeley, CA 94720, USA. maok@lbl.gov
authors.forename: M A
authors.initials: MA
authors.lastname: O'Keefe
authors.forename: C J
authors.initials: CJ
authors.lastname: Hetherington
authors.forename: Y C
authors.initials: YC
authors.lastname: Wang
authors.forename: E C
authors.initials: EC
authors.lastname: Nelson
authors.forename: J H
authors.initials: JH
authors.lastname: Turner
authors.forename: C
authors.initials: C
authors.lastname: Kisielowski
authors.forename: J O
authors.initials: JO
authors.lastname: Malm
authors.forename: R
authors.initials: R
authors.lastname: Mueller
authors.forename: J
authors.initials: J
authors.lastname: Ringnalda
authors.forename: M
authors.initials: M
authors.lastname: Pan
authors.forename: A
authors.initials: A
authors.lastname: Thust