title: Role of Surface Chemistry in Semiconductor Thin Film Processing.
authors.affiliation: Departments of Chemical Engineering and of Chemistry and Biochemistry, Center for Materials Chemistry, and Center for Synthesis, Growth, and Analysis of Electronic Materials, University of Texas at Austin, Austin, Texas 78712.
authors.forename: J. G.
authors.initials: JG
authors.lastname: Ekerdt
authors.forename: Y.-M.
authors.initials: YM
authors.lastname: Sun
authors.forename: A.
authors.initials: A
authors.lastname: Szabo
authors.forename: G. J.
authors.initials: GJ
authors.lastname: Szulczewski
authors.forename: J. M.
authors.initials: JM
authors.lastname: White