title: X-ray multilayer monochromator with enhanced performance.
abstract: An x-ray multilayer monochromator with improved resolution and a low specular background is presented. The monochromator consists of a lamellar multilayer amplitude grating with appropriate parameters used at the zeroth diffraction order. The device is fabricated by means of combining deposition of thin films on a nanometer scale, UV lithography, and reactive ion etching. The performance of this new monochromator at photon energies near 1500 eV is shown.
authors.affiliation: Laboratoire de Chimie Physique, Matière et Rayonnement, Université Pierre et Marie Curie, Centre National de la Recherche Scientifique, Unité Mixte de Recherche 7416, Paris, France. andrejm@ccr.jussieu.fr
authors.forename: Jean-Michel
authors.initials: JM
authors.lastname: André
authors.forename: Rabah
authors.initials: R
authors.lastname: Benbalagh
authors.forename: Robert
authors.initials: R
authors.lastname: Barchewitz
authors.forename: Marie-Françoise
authors.initials: MF
authors.lastname: Ravet
authors.forename: Alain
authors.initials: A
authors.lastname: Raynal
authors.forename: Frank
authors.initials: F
authors.lastname: Delmotte
authors.forename: Françoise
authors.initials: F
authors.lastname: Bridou
authors.forename: Gwénäelle
authors.initials: G
authors.lastname: Julié
authors.forename: Alain
authors.initials: A
authors.lastname: Bosseboeuf
authors.forename: René
authors.initials: R
authors.lastname: Laval
authors.forename: Gérard
authors.initials: G
authors.lastname: Soullié
authors.forename: Christian
authors.initials: C
authors.lastname: Rémond
authors.forename: Michel
authors.initials: M
authors.lastname: Fialin