title: Investigation of membrane deformation by a fringe projection method.
abstract: An optical method has been developed to measure the deformation of a membrane in a microphone. A fringe projector that consists of an optical fiber and an optical wedge is described and analyzed by geometric optics. A three-step phase-shifting technique that involves the introduction of an arbitrary phase is discussed. The fine fringe patterns projected onto a small test surface are captured by a CCD camera mounted on a long-distance microscope. With the aid of a phase-shifting technique and signal-demodulating techniques, the proposed setup is capable of measuring deformation of the membrane of the order of as much as submicrometers.
authors.affiliation: Department of Mechanical Engineering, National University of Singapore, Singapore. mpewsh@nus.edu.sg
authors.forename: Shihua
authors.initials: S
authors.lastname: Wang
authors.forename: Cho Jui
authors.initials: CJ
authors.lastname: Tay
authors.forename: Chenggen
authors.initials: C
authors.lastname: Quan
authors.forename: Huai Min
authors.initials: HM
authors.lastname: Shang