Graded reflectivity micromirror arrays.
A technique for fabricating arrays of graded reflectivity micromirrors with diameters as small as 25 microm is reported. It is based on laser-induced physical vapor deposition through microholes on a thin free-standing noncontact mask, and it is suitable for applications in micro-optics and solid-state laser technology.
Cusumano
Pasquale
P
Dipartimento di Ingegneria Elettrica, Università di Palermo, Italy. cusumano@unipa.it
Lullo
Giuseppe
G
Mangione
Angelo
A
Arnone
Claudio
C