Fan-out diffractive optical elements designed for increased fabrication tolerances to linear relief depth errors.
The intensity uniformity of the spots generated by fan-out diffractive optical elements (DOEs) (or kinoforms) is often highly sensitive to any fabrication error that leads to a deviation of the surface-relief depth of the DOE from its design value. Many of the fabrication errors, such as those that are due to insufficient control of development or etch rates, increase almost linearly with the desired relief depth in every position of the DOE. We present an algorithm for designing fan-out DOEs with a significantly reduced sensitivity of the intensity uniformity to such errors. The reduced sensitivity can be obtained without reducing the efficiency of the DOE. Experimental results for fabricated DOEs show that reduced sensitivity is also obtained in practice.
Bengtsson
Jörgen
J
Department of Microelectronics, Microtechnology Center at Chalmers, Chalmers University of Technology, Göteborg, Sweden. jorgen@elm.chalmers.se
Johansson
Mathias
M