title: Internal stress and optical properties of Nb2O5 thin films deposited by ion-beam sputtering.
abstract: The influence on the internal stress and optical properties of Nb2O5 thin films with ion-beam energy was investigated. Nb2O5 thin films were deposited on unheated glass substrates by means of ion-beam sputtering with different ion-beam voltage, Vb. The refractive index, extinction coefficient, and surface roughness were found to depend on the ion-beam energy. The stresses in thin films were measured by the phase-shifting interferometry technique. The film stress was also found to be related to Vb, and a high compressive stress of -0.467 GPa was measured at Vb = 850 V. The Nb2O5-SiO2 multilayer coatings had smaller average compressive stress as compared with single-layer Nb2O5 film.
authors.affiliation: Institute of Optical Sciences, National Central University, Chung-li, Taiwan. cclee@ios.ncu.edu.tw
authors.forename: Cheng-Chung
authors.initials: CC
authors.lastname: Lee
authors.forename: Chuen-Lin
authors.initials: CL
authors.lastname: Tien
authors.forename: Jin-Cherng
authors.initials: JC
authors.lastname: Hsu