title: Point-spread function for a rotationally symmetric birefringent lens.
abstract: Imaging properties of a birefringent lens, in which the fast (or the slow) axis is distributed in the radial direction whereas magnitude of birefringence varies as a quadratic function of the pupil radius, are investigated by calculating a point-spread function. It is found that the point image is analytically described by using the Lommel function as well as the zero-order Bessel function, and a localized intensity null surrounded by bright regions in all directions can be realized at a geometrical focus under certain conditions. The magnitude of birefringence that is tolerable in image formations is also discussed, assuming that the lens is applied to microlithography.
authors.affiliation: Optics Technology Research Center, Canon Inc., Utsunomiya-shi, Tochigi-ken, Japan. unno.yasuyuki@canon.co.jp
authors.forename: Yasuyuki
authors.initials: Y
authors.lastname: Unno