Discharge impedance of solenoidal inductively coupled plasma discharge.
The discharge impedance is calculated for a solenoidal inductively coupled plasma (ICP) discharge, which is one of the important sources for plasma processing. To calculate this impedance, the electromagnetic field quantities are obtained by solving the two-dimensional Maxwell equations in a realistic geometry. Also considered in the calculation is the anomalous skin effect which is regarded as a collisionless heating mechanism of ICP discharge. The results show that the discharge impedance is a function of various discharge parameters, such as plasma density, electron temperature, antenna position, collision frequency, excitation frequency, and chamber geometry.
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Korea Basic Science Institute, Taejeon 305-333, Korea.
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