Ion-molecule reactions and ion energies in a CF4 discharge.
Absolute cross sections have been measured for reactants typically found in carbon tetrafluoride (CF(4)) discharges for collision energies below a few hundred electron volts. The reactions investigated include collision-induced dissociation and dissociative electron transfer reactions for CF(+)(3) and F(+) colliding with CF(4), and collisional electron detachment for F(-) colliding with CF4. Also presented are measurements of energies and relative intensities of ions generated in dc Townsend CF4 discharges with E/N values ranging from 4 x 10(-18) V m(2) to 25 x 10(-18) V m(2) [4 to 25 kTd]. Ion energy and ion intensity data for the Townsend discharges are analyzed in light of the measured cross sections.
Peko
B L
BL
Department of Physics, College of William and Mary, Williamsburg, Virginia 23187, USA.
Dyakov
I V
IV
Champion
R L
RL
Rao
M V
MV
Olthoff
J K
JK