Elemental analysis with a full-field X-ray fluorescence microscope and a CCD photon-counting system.
The first result is presented of an X-ray fluorescence microscope with a Wolter mirror in combination with a CCD camera used as an energy-resolved two-dimensional detector in photon-counting mode. Two-dimensional elemental maps of metallic wires, such as Fe, Co, Ni and Cu, and inclusions of a synthesized diamond could be obtained with an energy resolution of 350 eV.
Ohigashi
Takuji
T
Institute of Applied Physics, University of Tsukuba, 1-1-1 Tennoudai, Tsukuba, Ibaraki 305-8573, Japan.
Watanabe
Norio
N
Yokosuka
Hiroki
H
Aota
Tatsuya
T
Takano
Hidekazu
H
Takeuchi
Akihisa
A
Aoki
Sadao
S