title: Zernike-type X-ray imaging microscopy at 25 keV with Fresnel zone plate optics.
abstract: A Zernike-type imaging microscope using a sputtered-sliced Fresnel zone plate (SS-FZP) has been developed and tested at an X-ray energy of 25 keV. The SS-FZP was used as an objective. A copper (Cu) phase plate was placed at the back focal plane of the SS-FZP in order to produce phase contrast. The performance of the Zernike-type imaging microscope was tested with a gold (Au) mesh and a resolution test pattern at undulator beamline 47 of SPring-8. The Au mesh and the resolution test pattern could be imaged in transmission with a magnification of x10.2. Owing to the Cu phase plate, different image contrast was observed compared with the bright-field image contrast. Tantalum microstructures down to 0.5 microm line-and-space have been observed on spatial resolution test patterns.
authors.affiliation: Japan Synchrotron Radiation Research Institute (JASRI), SPring-8, Kouto 1-1-1, Mikazuki, Sayo-gun, Hyogo 679-5198, Japan. awaji@spring8.or.jp
authors.forename: M
authors.initials: M
authors.lastname: Awaji
authors.forename: Y
authors.initials: Y
authors.lastname: Suzuki
authors.forename: A
authors.initials: A
authors.lastname: Takeuchi
authors.forename: H
authors.initials: H
authors.lastname: Takano
authors.forename: N
authors.initials: N
authors.lastname: Kamijo
authors.forename: S
authors.initials: S
authors.lastname: Tamura
authors.forename: M
authors.initials: M
authors.lastname: Yasumoto