title: Performance of normal-incidence molybdenum-yttrium multilayer-coated diffraction grating at a wavelength of 9 nm.
abstract: The first experimental investigation of a normal-incidence Mo-Y multilayer-coated diffraction grating operating at a 9-nm wavelength is reported. The substrate is a replica of a concave holographic ion-etched blazed grating with 2,400 grooves/mm and a 2-m radius of curvature. The measured peak efficiency in the -3 order is 2.7% at a wavelength of 8.79 nm. To our knowledge, this is the highest normal-incidence grating efficiency ever obtained in this wavelength region.
authors: Physics and Advanced Technologies, Lawrence Livermore National Laboratory, Livermore, California 94551, USA. saelao@llnl.gov
authors: Benjawan
authors: B
authors: Sae-Lao
authors: Sasa
authors: S
authors: Bajt
authors: Claude
authors: C
authors: Montcalm
authors: John F
authors: JF
authors: Seely