Nonlocal electron kinetics and excited state densities in a magnetron discharge in argon.
The densities of argon metastable (3)P(2), and resonance (1)P(1), (3)P(1) states were measured along a cylindrical magnetron discharge radius by absorption spectroscopy using a narrow bandwidth single mode diode laser. The theoretical treatment includes calculations of the rates of numerous excitation and decay processes based on nonlocal electron kinetics, and analysis of the transport equations for the resonance and metastable atoms. The solution technique of the Biberman-Holstein equation of radiation transport is developed in conformity with magnetron discharge geometry. The radial profile of the effective lifetime is obtained, taking into account radiation escape on the inner and outer electrodes. The distinction in formations of the radial profiles of the resonance and metastable atoms caused by specifics of radiation transport and diffusion is demonstrated. The results of experiments and calculations are compared.
Porokhova
I A
IA
Institute for Physics, Ernst-Moritz-Arndt University, Domstrasse 10a, D-17489 Greifswald, Germany.
Golubovskii
Yu B
YB
Csambal
C
C
Helbig
V
V
Wilke
C
C
Behnke
J F
JF