title: Grazing-exit X-ray spectrometry for surface and thin-film analyses.
abstract: Electron-probe x-ray micro analysis (EPMA) and particle-induced x-ray emission analysis (PIXE) were performed under grazing-exit conditions. To control the exit angle (take-off angle), a new sample holder having a stepping motor was developed for grazing-exit EPMA. A carefully polished surface of a stainless-steal sample was measured. The surface of stainless steel is normally covered with a thin native oxide layer. The intensity ratio of Cr K(alpha) to Fe K(alpha) increases significantly at the grazing angle, becoming about 5-times larger at 0.2 degrees than at 40 degrees. This result indicates that grazing-exit EPMA is useful for surface analysis. In addition, a new PIXE equipment was developed for grazing-exit x-ray measurements. The sample is fixed and the x-ray detector is moved by applying a linear stage. Preliminary experimental results of grazing-exit PIXE are also shown.
authors: Institute for Materials Research, Tohoku University, Aoba, Sendai, Japan.
authors: K
authors: K
authors: Tsuji
authors: Z
authors: Z
authors: Spolnik
authors: K
authors: K
authors: Wagatsuma
authors: S
authors: S
authors: Nagata
authors: I
authors: I
authors: Satoh