High-reflectivity HfO2/SiO2 ultraviolet mirrors.
High-reflectivity dense multilayer coatings were produced for the ultraviolet spectral region. Thin-film single layers and UV mirrors were deposited by ion plating and plasma ion-assisted deposition high-energetic technologies. Optical characterizations of HfO2 and SiO2 single layers are made. The optical constants obtained for these two materials are presented. HfO2 and SiO2 mirrors with a reflectance of approximately 99% near 250 nm are reported.
Torchio
Philippe
P
Institut Fresnel, Unité Mixte de Recherche, Centre National de la Recherche Scientifique, Ecole National Supérieure de Physique de Marseille, Domaine Universitaire de St Jérĵme, France. philippe.torchio@fresnel.fr
Gatto
Alexandre
A
Alvisi
Marco
M
Albrand
Gérard
G
Kaiser
Norbert
N
Amra
Claude
C