title: Mechanical stress and thermal-elastic properties of oxide coatings for use in the deep-ultraviolet spectral region.
abstract: Mechanical stress and the structures of SiO2, Al2O3, and HfO2 single oxide layers and of high-reflection multilayer coatings deposited by reactive evaporation, plasma ion-assisted deposition, and ion-beam sputtering have been studied. The stress was related to the microstructure and to the incorporation of water by means of infrared spectroscopy. From the slopes of measured stress-temperature curves of these coatings deposited onto two substrate materials (silicon and fused silica), the biaxial moduli and the thermal expansion coefficients of the films were estimated.
authors.affiliation: Fraunhofer Institute of Applied Optics and Precision Engineering, Jena, Germany. rthielsch@southwalleurope.de
authors.forename: Roland
authors.initials: R
authors.lastname: Thielsch
authors.forename: Alexandre
authors.initials: A
authors.lastname: Gatto
authors.forename: Norbert
authors.initials: N
authors.lastname: Kaiser