Effect of small amounts of hydrogen added to argon glow discharges: hybrid Monte Carlo-fluid model.
A hybrid Monte Carlo-fluid modeling network is developed for an argon-hydrogen mixture, to predict the effect of small amounts of hydrogen added to a dc argon glow discharge. The species considered in the model include the Ar gas atoms, electrons, Ar(+) ions and fast Ar atoms, ArH(+), H(+), H(2)(+) and H(3)(+) ions, and H atoms and H(2) molecules, as well as Ar metastable atoms, sputtered Cu atoms, and the corresponding Cu(+) ions. Sixty-five reactions between these species are incorporated in the model. The effect of hydrogen on various calculation results is investigated, such as the species densities, the relative role of different production and loss processes for the various species, the cathode sputtering rate and contributions by different bombarding species, and the dissociation degree of H(2) and the ionization degree of Ar and Cu. The calculation results are presented and discussed for 1% H(2) addition, and comparison is also made with a pure argon discharge and with only 0.1% H(2) addition.
Bogaerts
Annemie
A
Department of Chemistry, University of Antwerp, Universiteitsplein 1, B-2610 Wilrijk-Antwerp, Belgium. annemie.bogaerts@ua.ac.be
Gijbels
Renaat
R