title: Angle-resolved ellipsometry of light scattering: discrimination of surface and bulk effects in substrates and optical coatings.
abstract: Angle-resolved ellipsometry of light scattering is an original technique developed at the Fresnel Institute to identify scattering processes in substrates and multilayers. We extend the investigation because numerous experimental results proved that the technique can be of major interest for analysis of microcomponents and their scattering origins. Surface and bulk effects can be separated in most situations, as well as the oblique growth of materials and the presence of first-order contaminants.
authors.affiliation: Institut Fresnel, Unité Mixte de Recherche, Centre National de la Recherche Scientifique 6133, Ecole Nationale Supérieure de Physique de Marseille, Domaine Universitaire de St. Jérome, France. carole.deumie@fresnel.fr
authors.forename: Carole
authors.initials: C
authors.lastname: Deumié
authors.forename: Hugues
authors.initials: H
authors.lastname: Giovannini
authors.forename: Claude
authors.initials: C
authors.lastname: Amra