Deposition of a conductive near-infrared cutoff filter by radio-frequency magnetron sputtering.
We have designed a conductive near-infrared (NIR) cutoff filter for display application, i.e., a modified low-emissivity filter based on the three periods of the basic design of [TiO2[Ti]Ag] TiO2] upon a glass substrate and investigated the optical, structural, chemical, and electrical properties of the conductive NIR cutoff filter prepared by a radio frequency magnetron sputtering system. The results show that the average transmittance is 61.1% in the visible, that the transmittance in the NIR is less than 6.6%, and that the sheet resistance and emissivity are 0.9 ohms/square (where square stands for a square film) and 0.012, respectively, suggesting that the conductive NIR cutoff filter can be employed as a shield against the hazard of electromagnetic waves as well as to cut off the NIR.
Lee
Jang-Hoon
JH
Department of Physics, Inha University, Incheon, Republic of Korea.
Lee
Seung-Hyu
SH
Yoo
Kwang-Lim
KL
Kim
Nam-Young
NY
Hwangbo
Chang Kwon
CK