Black layer coatings for the photolithographic manufacture of diffraction gratings.
A black layer coating for an aluminum-photoresist interface with a reflectance less than 0.1% for 413-nm, s-polarized light incident at 25 degrees is described. It is made of space-compatible materials, and its rms roughness is less than 15 A.
Poitras
Daniel
D
Institute for Microstructural Sciences, National Research Council of Canada, Ottawa, Ontario. daniel.poitras@nrc.ca
Dobrowolski
J A
JA
Cassidy
Tom
T
Midwinter
Clive
C
McElroy
C Thomas
CT