title: High-reflectivity HfO2/SiO2 ultraviolet mirrors.
abstract: High-reflectivity dense multilayer coatings were produced for the ultraviolet spectral region. Thin-film single layers and UV mirrors were deposited by ion plating and plasma ion-assisted deposition high-energetic technologies. Optical characterizations of HfO2 and SiO2 single layers are made. The optical constants obtained for these two materials are presented. HfO2 and SiO2 mirrors with a reflectance of approximately 99% near 250 nm are reported.
authors.affiliation: Institut Fresnel, Unité Mixte de Recherche, Centre National de la Recherche Scientifique, Ecole National Supérieure de Physique de Marseille, Domaine Universitaire de St Jérĵme, France. philippe.torchio@fresnel.fr
authors.forename: Philippe
authors.initials: P
authors.lastname: Torchio
authors.forename: Alexandre
authors.initials: A
authors.lastname: Gatto
authors.forename: Marco
authors.initials: M
authors.lastname: Alvisi
authors.forename: Gérard
authors.initials: G
authors.lastname: Albrand
authors.forename: Norbert
authors.initials: N
authors.lastname: Kaiser
authors.forename: Claude
authors.initials: C
authors.lastname: Amra