title: Piezoelectric tantalum pentoxide studied for optical tunable applications.
abstract: Piezoelectric transparent thin films are of great interest for use in tunable filters. We present experimental results on Ta2O5 single layers coated on fused-silica substrates with an electron-beam deposition process. Above 450 degrees C, coatings change from an amorphous to a polycrystallized structure. When this structure shows a preferred orientation matching the piezoelectric tensor of the Ta2O5 crystal and the external electric field, variation in the piezoelectric layer thickness is expected. We detail experimental results in terms of optical (spectrophotometric and scattering measurements) and nonoptical characterizations (x-ray diffraction and scanning electron microscopy). Then the resultant thickness variation under oscillating applied voltage is measured with an extrinsic Fabry-Perot interferometer setup.
authors.affiliation: Institut Fresnel, Unité Mixte de Recherche, Centre National de la Recherche Scientifique 6133, Ecole Nationale Supérieure de Physique de Marseille, Domaine Universitaire de Saint Jérĵme, France. remy.parmentier@fresnel.fr
authors.forename: Rémy
authors.initials: R
authors.lastname: Parmentier
authors.forename: Fabien
authors.initials: F
authors.lastname: Lemarchand
authors.forename: Michel
authors.initials: M
authors.lastname: Cathelinaud
authors.forename: Michel
authors.initials: M
authors.lastname: Lequime
authors.forename: Claude
authors.initials: C
authors.lastname: Amra
authors.forename: Stéphane
authors.initials: S
authors.lastname: Labat
authors.forename: Stéphanie
authors.initials: S
authors.lastname: Bozzo
authors.forename: Franck
authors.initials: F
authors.lastname: Bocquet
authors.forename: Ahmed
authors.initials: A
authors.lastname: Charaï
authors.forename: Olivier
authors.initials: O
authors.lastname: Thomas
authors.forename: Christian
authors.initials: C
authors.lastname: Dominici