title: Black layer coatings for the photolithographic manufacture of diffraction gratings.
abstract: A black layer coating for an aluminum-photoresist interface with a reflectance less than 0.1% for 413-nm, s-polarized light incident at 25 degrees is described. It is made of space-compatible materials, and its rms roughness is less than 15 A.
authors.affiliation: Institute for Microstructural Sciences, National Research Council of Canada, Ottawa, Ontario. daniel.poitras@nrc.ca
authors.forename: Daniel
authors.initials: D
authors.lastname: Poitras
authors.forename: J A
authors.initials: JA
authors.lastname: Dobrowolski
authors.forename: Tom
authors.initials: T
authors.lastname: Cassidy
authors.forename: Clive
authors.initials: C
authors.lastname: Midwinter
authors.forename: C Thomas
authors.initials: CT
authors.lastname: McElroy