title: Ion chromatographic analysis of anions in ammonium hydroxide, hydrofluoric acid, and slurries, used in semiconductor processing.
abstract: In this study, ion chromatography (IC) with suppressed conductivity detection was used for the determination of trace anions in 29% (w/w) ammonium hydroxide, 49% (w/w) hydrofluoric acid and slurries. For these samples, various sample pretreatment methods were applied to eliminate matrix interferences. For concentrated ammonium hydroxide, an on-line electrochemical neutralizer (SP10 AutoNeutralization module) was used to neutralize the base prior to the IC analysis. For concentrated hydrofluoric acid, a heart cutting technique with an ion-exclusion column was used to separate the anions of interest prior to an IC separation. A method was also developed to analyze chloride in silica slurries by IC.
authors.affiliation: ChemTrace Corp, Fremont, CA 94538, USA. kefei_wang@chemtrace.com
authors.forename: Kefei
authors.initials: K
authors.lastname: Wang
authors.forename: Yun
authors.initials: Y
authors.lastname: Lei
authors.forename: Mark
authors.initials: M
authors.lastname: Eitel
authors.forename: Samantha
authors.initials: S
authors.lastname: Tan
mesh_terms: D064753:Ammonium Hydroxide; D000838:Anions / Q000032:analysis*; D002138:Calibration; D002853:Chromatography, Liquid / Q000379:methods*; D006858:Hydrofluoric Acid / Q000737:chemistry*; D006878:Hydroxides / Q000737:chemistry*; D012666:Semiconductors
chemical_list: D000838:Anions; D006878:Hydroxides; D064753:Ammonium Hydroxide; D006858:Hydrofluoric Acid