Interfacial chemistries for nanoscale transfer printing.
We describe a patterning technique that uses self-assembled monolayers and other surface chemistries for guiding the transfer of material from relief features on a stamp to a substrate. This purely additive contact printing technique is capable of nanometer resolution. Pattern transfer is fast and it occurs at ambient conditions. We illustrate the versatility of this method by printing single-layer metal patterns with feature sizes from a few tens of microns to a few tens of nanometers. We also demonstrate its use for patterning, in a single step, metal/dielectric/metal multilayers for functional thin film capacitors on plastic substrates.
Loo
Yueh-Lin
YL
Bell Laboratories, Lucent Technologies, Murray Hill, NJ 07974, USA.
Willett
Robert L
RL
Baldwin
Kirk W
KW
Rogers
John A
JA