Fabrication of optics by use of plasma chemical vaporization machining with a pipe electrode.
We figure optical surfaces by plasma chemical vaporization machining (CVM) with a pipe electrode, in which an rf plasma generated at the electrode tip under approximately atmospheric pressure moves over the surfaces. We propose a shaping method in which the movement of plasma on the surfaces can be determined. Flat and aspheric surfaces are successfully figured with the desired peak-to-valley shape accuracy of 0.1 microm. The root-mean-square roughness of the resultant surfaces is at the subnanometer level. These results confirm that the plasma CVM and the shaping method have the capability to fabricate optics with high accuracy.
Takino
Hideo
H
Nikon Corporation, Sagamihara, Kanagawa, Japan. takino@nikongw.nikon.co.jp
Shibata
Norio
N
Itoh
Hiroshi
H
Kobayashi
Teruki
T
Yamamura
Kazuya
K
Sano
Yasuhisa
Y
Mori
Yuzo
Y