title: iTIRM as a tool for qualifying polishing processes.
abstract: We report on what we believe to be a novel classification method for polishing processes that we apply in our laboratory on a regular basis. Two parameters are deduced from the in situ iTIRM (intensity-detecting total-internal-reflection microscopy) measurement method. Contrary to Preston's law, which gives the removal rate, the parameters of the iTIRM process are a measure of the change in surface quality (roughness, subsurface damage, and scratch and dig) and the duration of the polishing process.
authors.affiliation: FISBA-Optik, Gallen, Switzerland. oliver.faehnle@fisba.ch
authors.forename: Oliver W
authors.initials: OW
authors.lastname: Fähnle
authors.forename: Torsten
authors.initials: T
authors.lastname: Wons
authors.forename: Evelyn
authors.initials: E
authors.lastname: Koch
authors.forename: Sebastién
authors.initials: S
authors.lastname: Debruyne
authors.forename: Mark
authors.initials: M
authors.lastname: Meeder
authors.forename: Silvia M
authors.initials: SM
authors.lastname: Booij
authors.forename: Joseph J M
authors.initials: JJ
authors.lastname: Braat