title: Deterministic retrieval of surface waviness by means of topography with coherent X-rays.
abstract: A surface profile retrieval technique from multiple X-ray total reflection images taken at various distances with full coherent illumination is demonstrated. An experiment was performed using the 1 km-long BL29XU beamline at the SPring-8 facility, Japan. Obtained results are compared with results from the optical metrology technique (Fizeau's interferometer). Good agreement between X-ray and optical methods proves the validity of the current approach. Meanwhile, the sensitivity of the X-ray technique is several times higher than that of the standard one. This technique is well suited to the needs of characterizing grazing optics for new-generation X-ray sources.
authors.affiliation: SPring-8/JASRI, Kouto 1-1-1, Mikazuki, Hyogo 679-5148, Japan. souvorov@spring8.or.jp
authors.forename: A
authors.initials: A
authors.lastname: Souvorov
authors.forename: M
authors.initials: M
authors.lastname: Yabashi
authors.forename: K
authors.initials: K
authors.lastname: Tamasaku
authors.forename: T
authors.initials: T
authors.lastname: Ishikawa
authors.forename: Y
authors.initials: Y
authors.lastname: Mori
authors.forename: K
authors.initials: K
authors.lastname: Yamauchi
authors.forename: K
authors.initials: K
authors.lastname: Yamamura
authors.forename: A
authors.initials: A
authors.lastname: Saito