title: Fabrication of optics by use of plasma chemical vaporization machining with a pipe electrode.
abstract: We figure optical surfaces by plasma chemical vaporization machining (CVM) with a pipe electrode, in which an rf plasma generated at the electrode tip under approximately atmospheric pressure moves over the surfaces. We propose a shaping method in which the movement of plasma on the surfaces can be determined. Flat and aspheric surfaces are successfully figured with the desired peak-to-valley shape accuracy of 0.1 microm. The root-mean-square roughness of the resultant surfaces is at the subnanometer level. These results confirm that the plasma CVM and the shaping method have the capability to fabricate optics with high accuracy.
authors.affiliation: Nikon Corporation, Sagamihara, Kanagawa, Japan. takino@nikongw.nikon.co.jp
authors.forename: Hideo
authors.initials: H
authors.lastname: Takino
authors.forename: Norio
authors.initials: N
authors.lastname: Shibata
authors.forename: Hiroshi
authors.initials: H
authors.lastname: Itoh
authors.forename: Teruki
authors.initials: T
authors.lastname: Kobayashi
authors.forename: Kazuya
authors.initials: K
authors.lastname: Yamamura
authors.forename: Yasuhisa
authors.initials: Y
authors.lastname: Sano
authors.forename: Yuzo
authors.initials: Y
authors.lastname: Mori