title: Sensitivity of a miniaturized touch probe sensor using PZT thin film vibrator.
abstract: In this paper, an improved touch probe sensor device for higher sensitivity and low contact force is reported. In order to improve the resolution, we have evaluated the sensitivity and fabricated a miniaturized sensor. The sensor transducer was 3 mm long and had higher resonance frequency. The resonance frequency of the vibrator was 937 kHz. Evaluated sensitivity was 1.0 x 10(-1) mV/nm. This value equals five times larger than that of a previous sensor. Miniaturization of the sensor device carried smaller vibration operation and higher sensitivity.
authors.affiliation: The University of Tokyo, Graduate School of Engineering, Japan. kanda@intellect.pe.u-tokyo.ac.jp
authors.forename: Takefumi
authors.initials: T
authors.lastname: Kanda
authors.forename: Minoru K
authors.initials: MK
authors.lastname: Kurosawa
authors.forename: Toshiro
authors.initials: T
authors.lastname: Higuchi