title: Characterization of nano-dimensional thin-film elastic moduli using magnetoelastic sensors.
abstract: Application of magnetoelastic thick-film sensors to the measurement of thin-film elastic moduli is described in this study. An analytical model is derived, that relates the resonant frequency of a magnetoelastic sensor to the elasticity and density of an applied thin-film. Limits of the model are analyzed, and related to experimental measurements using thin-films of silver and aluminum. For 500 nm thick-films, the measured Young's modulus of elasticity for Al and Ag is found to be within 1.6% of standard data. Using commercially available magnetoelastic sensors, the elasticity of coatings, approximately 30 nm thick, can readily be measured.
authors.affiliation: Department of Electrical Engineering and Materials Research Institute, The Pennsylvania State University, University Park 16802, USA.
authors.forename: S
authors.initials: S
authors.lastname: Schmidt
authors.forename: C A
authors.initials: CA
authors.lastname: Grimes
mesh_terms: D000535:Aluminum; D004548:Elasticity; D004784:Environmental Monitoring / Q000295:instrumentation*; D008280:Magnetics; D008962:Models, Theoretical; D012834:Silver
chemical_list: D012834:Silver; D000535:Aluminum