title: Measurement of elastic-stiffness tensor of an anisotropic thin film by electromagnetic acoustic resonance.
abstract: This paper presents a contactless methodology for determining all independent elastic-stiffness coefficients Cij of a transverse isotropic thin film: C11, C12, C13, C33, and C44. The electromagnetic-acoustic-resonance technique measures the acoustic resonance frequencies of a film-coated specimen with a high accuracy, better than 10(-5), which enables determining the film Cij with the known substrate Cij. The measurement takes two steps. First, through-thickness resonance frequencies of longitudinal and shear modes are measured to determine C33 and C44, and the film thickness. Then, remaining three coefficients are deduced from measurements of the free-vibration resonance frequencies of the layer parallelepiped specimen. Simulations and experiments with monocrystal copper and titanium confirm the reliability of the resultant film Cij within 5%, when the film thickness is more than 0.5% of the substrate.
authors.affiliation: Graduate School of Engineering Science, Osaka University, Toyonaka, Japan. ogi@me.es.osaka-u.ac.jp
authors.forename: Hirotsugu
authors.initials: H
authors.lastname: Ogi
authors.forename: Goh
authors.initials: G
authors.lastname: Shimoike
authors.forename: Kazuki
authors.initials: K
authors.lastname: Takashima
authors.forename: Masahiko
authors.initials: M
authors.lastname: Hirao