title: High-accuracy position and orientation measurement of extended two-dimensional surfaces by a phase-sensitive vision method.
abstract: We introduced recently phase measurements usually performed in interferometry to the domain of image processing and intelligent vision [IEEE Trans. Instrum. Meas. 49, 867 (2000)]. Our purpose is to sense with a high accuracy the position, orientation, and displacement of two-dimensional (2D) surfaces observed by a static vision system. We report on significant improvements of the method. Experimental measurements reveal a peak-valley noise of approximately 10(-2) CCD pixel, corresponding approximately to a 10(-3) period of the phase reference pattern. Then the observation of 10 microm scaled features enables an accuracy of a few nm in the position sensing of the phase reference pattern for the extended 2D measurement range.
authors.affiliation: Laboratoire d'Optique P.M. Duffieux, Université de Franche-Comté, U.M.R. C.N.R.S. 6603, Besançon, France. Patrick.Sandoz@univ-fcomte.fr
authors.forename: Patrick
authors.initials: P
authors.lastname: Sandoz
authors.forename: Vincent
authors.initials: V
authors.lastname: Bonnans
authors.forename: Tijani
authors.initials: T
authors.lastname: Gharbi