Performance of the carbon nano-tube assembled tip for surface shape characterization.
The carbon nano-tube (CNT) has ideal properties for atomic force microscope (AFM) tips. We assembled a CNT using 2 three-axial manipulators in a scanning electron microscope (SEM) chamber. In this process, the length and angle of the CNT were adjusted by observing the SEM image, after which the CNT was glued by amorphouscarbon. The results of performance are as follows. The lifetime of the CNT tip proved to be 5 times better than that of the silicon tip when continuously measuring the micro-roughness of a Czochralski (Cz) P-type (100) silicon wafer. The CNT tip is able to trace a narrow space (width less than 1 microm) better than the conventional silicon tip because of its high aspect ratio. The relationship between the observed image and CNT geometry is discussed herein.
Yasutake
M
M
Seiko Instruments Inc., Sunto-gun, Shizuoka, Japan. masatoshi.yasitake@sii.co.jp
Shirakawabe
Y
Y
Okawa
T
T
Mizooka
S
S
Nakayama
Y
Y