title: Effect of vaporization and melt ejection on laser machining of silica glass micro-optical components.
abstract: A new regime for silica glass machining for micro-optical fabrication applications, which uses pulsed CO2 laser radiation in the 2.5-100-micros pulse width region that has been generated by an acousto-optic modulator, is investigated. A filamentary melt ejection process that generates fibers and significant melt displacement limits machining quality below 30-micros pulse width. Ablation and melt ejection thresholds are quantified relative to pulse width, and the region from 30 to 50 micros is identified for low-threshold, smooth machining without melt displacement and ejection effects.
authors.affiliation: Department of Physics, Heriot-Watt University, Edinburgh, Scotland.
authors.forename: Gavin A J
authors.initials: GA
authors.lastname: Markillie
authors.forename: Howard J
authors.initials: HJ
authors.lastname: Baker
authors.forename: Francisco J
authors.initials: FJ
authors.lastname: Villarreal
authors.forename: Denis R
authors.initials: DR
authors.lastname: Hall