title: Dual-wavelength interferometric technique with subnanometric resolution.
abstract: A new fringe subdivision method that employs a large synthetic wavelength to subdivide fringes formed by a small single wavelength is proposed. Based on this subdivision method, we demonstrate a novel dual-wavelength interferometric technique with subnanometric resolution, whose potential fringe subdivision factor derived from an evaluation of the interferometer can reach up to 1/440,000. Theoretical analysis and experimental results with a resolution of 0.05 nm are presented to show the feasibility of the interferometric technique.
authors.affiliation: Department of Precision Instruments, Tsinghua University, Beijing, China. chenby@post.pim.tsinghua.edu.cn
authors.forename: Benyong
authors.initials: B
authors.lastname: Chen
authors.forename: Xiaohui
authors.initials: X
authors.lastname: Cheng
authors.forename: Dacheng
authors.initials: D
authors.lastname: Li