title: X-ray-ultraviolet beam splitters for the Michelson interferometer.
abstract: With the aim of realizing a Michelson interferometer working at 13.9 nm, we have developed a symmetrical beam splitter with multilayers deposited on the front and back sides of a silicon nitride membrane. On the basis of the experimental optical properties of the membrane, simulations have been performed to define the multilayer structure that provides the highest reflectivity-transmission product. Optimized Mo-Si multilayers have been successfully deposited on both sides of t he membrane by use of the ion-beam sputtering technique, with a thickness-period reproducibility of 0.1 nm. Measurements by means of synchrotron radiation at 13.9 nm and at an angle of 45 degrees provide a reflectivity of 14.2% and a transmission of 15.2% for a 60% s-polarized light, close to the simulated values. Such a beam splitter has been used for x-ray laser Michelson interferometry at 13.9 nm. The first interferogram is discussed.
authors.affiliation: Laboratoire Charles Fabry de l'Institut d'Optique, Centre National de la Recherche Scientifique, Orsay, France. franck.delmotte@iota.u-psud.fr
authors.forename: Franck
authors.initials: F
authors.lastname: Delmotte
authors.forename: Marie-Françoise
authors.initials: MF
authors.lastname: Ravet
authors.forename: Françoise
authors.initials: F
authors.lastname: Bridou
authors.forename: Françoise
authors.initials: F
authors.lastname: Varnière
authors.forename: Philippe
authors.initials: P
authors.lastname: Zeitoun
authors.forename: Sébastien
authors.initials: S
authors.lastname: Hubert
authors.forename: Laurent
authors.initials: L
authors.lastname: Vanbostal
authors.forename: Gérard
authors.initials: G
authors.lastname: Soullie