title: Fabrication of a glass-implemented microcapillary electrophoresis device with integrated contactless conductivity detection.
abstract: Glass microdevices for capillary electrophoresis (CE) gained a lot of interest in the development of micrototal analysis systems (microTAS). The fabrication of a microTAS requires integration of sampling, chemical separation and detection systems into a microdevice. The integration of a detection system into a microchannel, however, is hampered by the lack of suitable microfabrication technology. Here, a microfabrication method for integration of insulated microelectrodes inside a leakage-free microchannel in glass is presented. A combination of newly developed technological approaches, such as low-temperature glass-to-glass anodic bonding, channel etching, fabrication of buried metal interconnects, and deposition of thin plasma-enhanced chemical vapour deposition (PECVD) silicon carbide layers, enables the fabrication of a CE microdevice with an integrated contactless conductivity detector. The fabrication method of this CE microdevice with integrated contactless conductivity detector is described in detail. Standard CE separations of three inorganic cations in concentrations down to 5 microM show the viability of the new microCE system.
authors.affiliation: DIMES ECTM, Delft University of Technology, Delft, The Netherlands. berthold@laas.fr
authors.forename: Axel
authors.initials: A
authors.lastname: Berthold
authors.forename: Frederic
authors.initials: F
authors.lastname: Laugere
authors.forename: Hugo
authors.initials: H
authors.lastname: Schellevis
authors.forename: Charles R
authors.initials: CR
authors.lastname: de Boer
authors.forename: Mario
authors.initials: M
authors.lastname: Laros
authors.forename: Rosanne M
authors.initials: RM
authors.lastname: Guijt
authors.forename: Pasqualina M
authors.initials: PM
authors.lastname: Sarro
authors.forename: Michiel J
authors.initials: MJ
authors.lastname: Vellekoop
mesh_terms: D015374:Biosensing Techniques; D017554:Carbon Compounds, Inorganic; D002412:Cations / Q000302:isolation & purification; D005591:Chemical Fractionation / Q000379:methods; D004553:Electric Conductivity; D019075:Electrophoresis, Capillary / Q000295:instrumentation* / Q000379:methods; D005898:Glass; D008904:Miniaturization; D017655:Silicon Compounds
chemical_list: D017554:Carbon Compounds, Inorganic; D002412:Cations; D017655:Silicon Compounds; C032734:silicon nitride; C022088:silicon carbide