Development of a THz spectroscopic imaging system.
We have developed a real-time THz imaging system based on the two-dimensional (2D) electro-optic (EO) sampling technique. Employing the 2D EO-sampling technique, we can obtain THz images using a CCD camera at a video rate of up to 30 frames per second. A spatial resolution of 1.4 mm was achieved. This resolution was reasonably close to the theoretical limit determined by diffraction. We observed not only static objects but also moving ones. To acquire spectroscopic information, time-domain images were collected. By processing these images on a computer, we can obtain spectroscopic images. Spectroscopy for silicon wafers was demonstrated.
Usami
M
M
TOCHIGI Nikon Corporation, 770 Midori, Ohtawara, Tochigi 324-8625, Japan.
Iwamoto
T
T
Fukasawa
R
R
Tani
M
M
Watanabe
M
M
Sakai
K
K
D003952:Diagnostic Imaging / Q000295:instrumentation* / Q000379:methods; D031257:Droseraceae / Q000502:physiology; D055590:Electromagnetic Phenomena / Q000295:instrumentation*; D004867:Equipment Design; D005240:Feasibility Studies; D008872:Microwaves; D009038:Motion; D009068:Movement / Q000502:physiology; D055095:Optics and Photonics / Q000295:instrumentation; D018515:Plant Leaves / Q000502:physiology; D011786:Quality Control; D012680:Sensitivity and Specificity; D012825:Silicon / Q000737:chemistry; D013057:Spectrum Analysis / Q000295:instrumentation* / Q000379:methods; D014741:Video Recording / Q000295:instrumentation* / Q000379:methods
D012825:Silicon