title: Metrology of pulsed radiation for 157-nm lithography.
abstract: In the framework of current development in 157-nm lithography we have investigated the performance of photodetectors with emphasis to their stability and linearity. The measurements were performed in the radiometry laboratories of the Physikalisch-Technische Bundesanstalt at the Berlin electron-storage rings BESSY I and BESSY II with spectrally dispersed synchrotron radiation as well as with highly pulsed F2 laser radiation at 157 nm in combination with a cryogenic radiometer as the primary detector standard. Relative standard uncertainties of as little as 1% were achieved for the calibration of photodetectors in the spectral range of ultraviolet and vacuum-ultraviolet radiation.
authors.affiliation: Physikalisch-Technische Bundesanstalt, Abbestrasse 2-12,10587 Berlin, Germany. mathias.richter@ptb.de
authors.forename: Mathias
authors.initials: M
authors.lastname: Richter
authors.forename: Udo
authors.initials: U
authors.lastname: Kroth
authors.forename: Alexander
authors.initials: A
authors.lastname: Gottwald
authors.forename: Christopher
authors.initials: C
authors.lastname: Gerth
authors.forename: Kai
authors.initials: K
authors.lastname: Tiedtke
authors.forename: Terubumi
authors.initials: T
authors.lastname: Saito
authors.forename: Ivan
authors.initials: I
authors.lastname: Tassy
authors.forename: Klaus
authors.initials: K
authors.lastname: Vogler