title: [Coating material of parlene C as encapsulation material for biomedical micro-implants].
abstract: Biomedical microsystems attain to contact with environments like blood, ephitHelium and saline solutions therefore they need an encapsulation. Parylene seems to be a suitable polymer to cover the implants and protect them against moisture and aggressive environment. This paper describes the characterisation of Parylene C coatings and its possibilities to protect implants. Beside the encapsulation of biomedical microsystems the manufacturing of fexible electrodes and the cytotoxicity behavior of RIE etched Parylene layers was investigated.
authors.affiliation: Fraunhofer Institut für Biomedizinische Technik, St. Ingbert, Deutschland. sascha.kammer@ibmt.fhg.de
authors.forename: S
authors.initials: S
authors.lastname: Kammer
authors.forename: S
authors.initials: S
authors.lastname: Wien
authors.forename: K P
authors.initials: KP
authors.lastname: Koch
authors.forename: A
authors.initials: A
authors.lastname: Robitzki
authors.forename: T
authors.initials: T
authors.lastname: Stieglitz
mesh_terms: D000818:Animals; D002470:Cell Survival / Q000187:drug effects; D020099:Coated Materials, Biocompatible / Q000737:chemistry* / Q000633:toxicity; D004567:Electrodes, Implanted; D006801:Humans; D007739:L Cells; D008422:Materials Testing; D051379:Mice; D008839:Microelectrodes; D011108:Polymers / Q000737:chemistry / Q000633:toxicity; D013329:Structure-Activity Relationship; D014992:Xylenes / Q000737:chemistry / Q000633:toxicity
chemical_list: D020099:Coated Materials, Biocompatible; D011108:Polymers; D014992:Xylenes; C011055:parylene