title: Design and fabrication of a silica on silicon integrated optical biochip as a fluorescence microarray platform.
abstract: Previous research into the use of Flame Hydrolysis Deposition (FHD) of glasses in integrated optics has focused on the successful commercial exploitation of low cost optical devices within the field of telecommunications and optoelectronics. Recently we have sought to apply these fabrication technologies to the development of optical biochips, utilising their ability to be integrated with microfluidics as a 'Lab-on-a-chip' platform. In this paper, we carry this development forward by seeking to create a microarray of integrated optical sensing elements, addressed using a glass-polymer hybrid technology in which poly(dimethylsiloxane), PDMS, is used as an elastomeric packaging over-layer. In particular, we describe the wide range of modelling and microfabrication processes required for the successful manufacture, integration and packaging of such arrays. The integration of both optical and fluidic circuits in this device avoids precise alignment requirements and results in a compact, robust and reliable device. Finally, in this paper, we describe the implementation of a pumping system for delivering small amounts of fluid across the array together with an optical signal treatment.
authors.affiliation: Department of Electronics and Electrical Engineering, The University of Glasgow, Glasgow G12 8LT, UK.
authors.forename: Jesus M
authors.initials: JM
authors.lastname: Ruano
authors.forename: Andrew
authors.initials: A
authors.lastname: Glidle
authors.forename: Alison
authors.initials: A
authors.lastname: Cleary
authors.forename: Adrian
authors.initials: A
authors.lastname: Walmsley
authors.forename: J Stewart
authors.initials: JS
authors.lastname: Aitchison
authors.forename: Jonathan M
authors.initials: JM
authors.lastname: Cooper
mesh_terms: D002232:Carbocyanines / Q000032:analysis; D020099:Coated Materials, Biocompatible / Q000138:chemical synthesis; D020650:Combinatorial Chemistry Techniques / Q000295:instrumentation / Q000379:methods; D004867:Equipment Design; D017022:Flow Injection Analysis / Q000295:instrumentation* / Q000379:methods; D005470:Fluorometry / Q000295:instrumentation* / Q000379:methods; D008567:Membranes, Artificial; D008832:Microchemistry / Q000295:instrumentation; D015336:Molecular Probe Techniques / Q000295:instrumentation*; D036103:Nanotechnology / Q000295:instrumentation* / Q000379:methods; D055096:Optical Devices; D055095:Optics and Photonics / Q000295:instrumentation*; D015203:Reproducibility of Results; D012680:Sensitivity and Specificity; D012825:Silicon
chemical_list: D002232:Carbocyanines; D020099:Coated Materials, Biocompatible; D008567:Membranes, Artificial; C085321:cyanine dye 5; D012825:Silicon