Electron-electron interactions in cathode objective lenses.
The impact of electron-electron interactions on the electron-optical performance of imaging cathode objective lenses is evaluated. Three types of cathode objectives are considered: decelerating and accelerating electrostatic, and combined magnetic lenses. The beam blur is calculated for field sizes ranging from 50 microm x 50 microm to 500 microm x 500 microm and total beam currents ranging from 200 nA to 20 microA. The functional dependence of the beam blur upon electron beam current and current density is elucidated in detail.
Mankos
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KLA-Tencor, 160 Rio Robles, San Jose, CA 95134, USA.
Adler
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