title: Characterization of an ultraviolet and a vacuum-ultraviolet irradiance meter with synchrotron radiation.
abstract: We have constructed and characterized a simple probe that is suitable for accurate measurements of irradiance in the UV to the vacuum UV spectral range. The irradiance meter consists of a PtSi detector located behind a 5-mm-diameter aperture. The probe was characterized at various wavelengths ranging from 130 to 320 mm by use of continuously tunable synchrotron radiation from the Synchrotron Ultra-violet Radiation Facility III. We determined the irradiance responsivity by scanning a small monochromatic beam over the active area of the irradiance meter and measuring its response on a grid with regular spacing. The angular response was also determined and shown to be suitable for applications such as photolithography. In addition, we studied the radiation damage using a 157-nm excimer laser and found that the irradiance meter can endure more than 100 J/cm2 of 157-nm radiation before a noticeable change occurs in its responsivity. Many industrial applications such as UV curing, photolithography, or semiconductor chip fabrication that require accurate measurement of the irradiance would benefit from having such a stable, accurate LTV irradiance meter.
authors.affiliation: Optical Technology Division, National Institute of Standards and Technology, Gaithersburg, Maryland 20899, USA. shaw@nist.gov
authors.forename: Ping-Shine
authors.initials: PS
authors.lastname: Shaw
authors.forename: Rajeev
authors.initials: R
authors.lastname: Gupta
authors.forename: Keith R
authors.initials: KR
authors.lastname: Lykke