Piezoelectric thick film ultrasonic transducers fabricated by a sol-gel spray technique.
Thick film broadband ultrasonic transducers (UTs) produced by a sol-gel spray technique and operated below 10 MHz are presented. These UTs are formed by dispersing PZT and LiTaO3 particles, respectively in Al2O3 and PZT sol-gel solution. The 50-100 microm thick films have been deposited on curved steel, flat steel and aluminum substrates and steel rods. Ultrasonic pulse-echo signals with a signal to noise ratio of more than 25 dB are experimentally obtained for the operating temperatures up to 250 degrees C.
Kobayashi
M
M
Department of ECE, McGill University, Montreal, Quebec, Canada H3A 2A7.
Olding
T R
TR
Sayer
M
M
Jen
C K
CK