Metrology of pulsed radiation for 157-nm lithography.
In the framework of current development in 157-nm lithography we have investigated the performance of photodetectors with emphasis to their stability and linearity. The measurements were performed in the radiometry laboratories of the Physikalisch-Technische Bundesanstalt at the Berlin electron-storage rings BESSY I and BESSY II with spectrally dispersed synchrotron radiation as well as with highly pulsed F2 laser radiation at 157 nm in combination with a cryogenic radiometer as the primary detector standard. Relative standard uncertainties of as little as 1% were achieved for the calibration of photodetectors in the spectral range of ultraviolet and vacuum-ultraviolet radiation.
Richter
Mathias
M
Physikalisch-Technische Bundesanstalt, Abbestrasse 2-12,10587 Berlin, Germany. mathias.richter@ptb.de
Kroth
Udo
U
Gottwald
Alexander
A
Gerth
Christopher
C
Tiedtke
Kai
K
Saito
Terubumi
T
Tassy
Ivan
I
Vogler
Klaus
K