Looking at trace impurities on silicon wafers with synchrotron radiation.
Baur
Katharina
K
Stanford University, CA, USA. baur@slac.stanford.edu
Brennan
Sean
S
Pianetta
Piero
P
Opila
Robert
R
D012666:Semiconductors / Q000592:standards; D012825:Silicon / Q000592:standards*; D013499:Surface Properties; D017356:Synchrotrons; D014173:Transistors, Electronic / Q000592:standards; D014965:X-Rays
D012825:Silicon