title: Round robin test for depth profiling of SiO2/Si multilayer.
authors.affiliation: Materials Characterization Division, National Metrology Institute of Japan, National Institute of Advanced Industrial Science and Technology, AIST Tsukuba Central 5, Higashi 1-1, Tsukuba, Ibaraki 305-8565, Japan.
authors.forename: Isao
authors.initials: I
authors.lastname: Kojima
authors.forename: Yasushi
authors.initials: Y
authors.lastname: Azuma
authors.forename: Junhua
authors.initials: J
authors.lastname: Xu
authors.forename: Takayuki
authors.initials: T
authors.lastname: Saitou
authors.forename: So
authors.initials: S
authors.lastname: Yonekubo
authors.forename: Naoko
authors.initials: N
authors.lastname: Shimosato