Round robin test for depth profiling of SiO2/Si multilayer.
Kojima
Isao
I
Materials Characterization Division, National Metrology Institute of Japan, National Institute of Advanced Industrial Science and Technology, AIST Tsukuba Central 5, Higashi 1-1, Tsukuba, Ibaraki 305-8565, Japan.
Azuma
Yasushi
Y
Xu
Junhua
J
Saitou
Takayuki
T
Yonekubo
So
S
Shimosato
Naoko
N