Double sinusoidal phase-modulating distributed-Bragg-reflector laser-diode interferometer for distance measurement.
A previously proposed double sinusoidal phase-modulating (DSPM) laser-diode interferometer measures distances larger than a half-wavelength by detecting modulation depth. Although it requires a vibrating mirror to provide the second modulation to the interference signal, such vibrations naturally affect measurement accuracy. We propose a static-type DSPM laser-diode interferometer that uses no mechanical modulation. Our experimental results indicate a measurement error of +/- 1.6 microm.
Suzuki
Takamasa
T
Faculty of Engineering, Niigata University, 8050 Ikarashi 2, Niigata 950-2181, Japan. takamasa@eng.niigata-u.ac.jp
Suda
Hiromi
H
Sasaki
Osami
O