title: Looking at trace impurities on silicon wafers with synchrotron radiation.
authors.affiliation: Stanford University, CA, USA. baur@slac.stanford.edu
authors.forename: Katharina
authors.initials: K
authors.lastname: Baur
authors.forename: Sean
authors.initials: S
authors.lastname: Brennan
authors.forename: Piero
authors.initials: P
authors.lastname: Pianetta
authors.forename: Robert
authors.initials: R
authors.lastname: Opila
mesh_terms: D012666:Semiconductors / Q000592:standards; D012825:Silicon / Q000592:standards*; D013499:Surface Properties; D017356:Synchrotrons; D014173:Transistors, Electronic / Q000592:standards; D014965:X-Rays
chemical_list: D012825:Silicon