title: Designing a non-volatile imaging switch for mass-persistent, chemically amplified photolithography: a model study.
abstract: An acid catalysed rearrangement that transforms a bicyclic lactone into a phenolic carboxylic acid has been tested for potential use in chemically amplified microlithographic imaging.
authors.affiliation: Department of Chemistry, University of California, Berkeley, CA 94720-1460, USA.
authors.forename: John M
authors.initials: JM
authors.lastname: Klopp
authors.forename: Nicolas
authors.initials: N
authors.lastname: Bensel
authors.forename: Zachary M
authors.initials: ZM
authors.lastname: Fresco
authors.forename: Jean M J
authors.initials: JM
authors.lastname: Fréchet