Effects of incidence angles of ions on the mass resolution of an energy compensated 3D atom probe.
We have used a first-order reflectron lens in an optical tomographic atom probe in order to improve the mass resolution. Calculations have been performed to determine the effect of second-order errors in ion energy and incidence angle on the performance of the lens. By applying a correction procedure based on the results of these calculations, we have been able to improve experimental mass resolution by 30%.
Bémont
E
E
Groupe de Physique des Matériaux, UMR CNRS 6634, Université et INSA de Rouen 76821 Cedex, Mont Saint Aignan, France. emilie.bemont@univ-rouen.fr
Bostel
A
A
Bouet
M
M
Da Costa
G
G
Chambreland
S
S
Deconihout
B
B
Hono
K
K