title: Effects of incidence angles of ions on the mass resolution of an energy compensated 3D atom probe.
abstract: We have used a first-order reflectron lens in an optical tomographic atom probe in order to improve the mass resolution. Calculations have been performed to determine the effect of second-order errors in ion energy and incidence angle on the performance of the lens. By applying a correction procedure based on the results of these calculations, we have been able to improve experimental mass resolution by 30%.
authors.affiliation: Groupe de Physique des Matériaux, UMR CNRS 6634, Université et INSA de Rouen 76821 Cedex, Mont Saint Aignan, France. emilie.bemont@univ-rouen.fr
authors.forename: E
authors.initials: E
authors.lastname: Bémont
authors.forename: A
authors.initials: A
authors.lastname: Bostel
authors.forename: M
authors.initials: M
authors.lastname: Bouet
authors.forename: G
authors.initials: G
authors.lastname: Da Costa
authors.forename: S
authors.initials: S
authors.lastname: Chambreland
authors.forename: B
authors.initials: B
authors.lastname: Deconihout
authors.forename: K
authors.initials: K
authors.lastname: Hono