Designing a non-volatile imaging switch for mass-persistent, chemically amplified photolithography: a model study.
An acid catalysed rearrangement that transforms a bicyclic lactone into a phenolic carboxylic acid has been tested for potential use in chemically amplified microlithographic imaging.
Klopp
John M
JM
Department of Chemistry, University of California, Berkeley, CA 94720-1460, USA.
Bensel
Nicolas
N
Fresco
Zachary M
ZM
Fréchet
Jean M J
JM