title: Nanoelectromechanical systems: Nanodevice motion at microwave frequencies.
authors.affiliation: Condensed Matter Physics, California Institute of Technology 114-36, Pasadena, California 91125, USA.
authors.forename: Xue Ming
authors.initials: XM
authors.lastname: Henry Huang
authors.forename: Christian A
authors.initials: CA
authors.lastname: Zorman
authors.forename: Mehran
authors.initials: M
authors.lastname: Mehregany
authors.forename: Michael L
authors.initials: ML
authors.lastname: Roukes