title: Dopant mapping for the nanotechnology age.
authors.affiliation: Department of Materials, University of Oxford, Parks Road, Oxford OX1 3PH, UK. martin.castell@material.oxford.ac.uk
authors.forename: Martin R
authors.initials: MR
authors.lastname: Castell
authors.forename: David A
authors.initials: DA
authors.lastname: Muller
authors.forename: Paul M
authors.initials: PM
authors.lastname: Voyles
mesh_terms: D016252:Microscopy, Scanning Tunneling; D036103:Nanotechnology / Q000379:methods*; D012666:Semiconductors