Automated analysis of SEM X-ray spectral images: a powerful new microanalysis tool.
Spectral imaging in the scanning electron microscope (SEM) equipped with an energy-dispersive X-ray (EDX) analyzer has the potential to be a powerful tool for chemical phase identification, but the large data sets have, in the past, proved too large to efficiently analyze. In the present work, we describe the application of a new automated, unbiased, multivariate statistical analysis technique to very large X-ray spectral image data sets. The method, based in part on principal components analysis, returns physically accurate (all positive) component spectra and images in a few minutes on a standard personal computer. The efficacy of the technique for microanalysis is illustrated by the analysis of complex multi-phase materials, particulates, a diffusion couple, and a single-pixel-detection problem.
Kotula
Paul G
PG
Materials Characterization Department, Sandia National Laboratories, PO Box 5800, MS 0886, Albuquerque, NM 87185-0886, USA. pgkotul@sandia.gov
Keenan
Michael R
MR
Michael
Joseph R
JR
D002516:Ceramics / Q000032:analysis / Q000737:chemistry; D003300:Copper / Q000032:analysis / Q000737:chemistry; D004058:Diffusion; D004577:Electron Probe Microanalysis / Q000379:methods / Q000706:statistics & numerical data; D007091:Image Processing, Computer-Assisted; D008670:Metals / Q000032:analysis / Q000737:chemistry; D008855:Microscopy, Electron, Scanning / Q000379:methods* / Q000706:statistics & numerical data; D015999:Multivariate Analysis; D009532:Nickel / Q000032:analysis / Q000737:chemistry; D010316:Particle Size; D025341:Principal Component Analysis; D013057:Spectrum Analysis / Q000379:methods* / Q000706:statistics & numerical data; D014965:X-Rays
D008670:Metals; D003300:Copper; D009532:Nickel