Measurement of longitudinal piezoelectric coefficient of thin films by a laser-scanning vibrometer.
A laser scanning vibrometer (LSV) was used for the first time to measure the piezoelectric coefficient of ferroelectric thin films based on the converse piezoelectric effect. The significant advantages of the use of the LSV for this purpose were demonstrated. Several key points were discussed in order to achieve reliable and accurate results.
Yao
Kui
K
Tay
Francis Eng Hock
FE
D000162:Acoustics / Q000295:instrumentation; D020099:Coated Materials, Biocompatible / Q000737:chemistry*; D003461:Crystallography / Q000295:instrumentation / Q000379:methods; D004867:Equipment Design; D007368:Interferometry / Q000295:instrumentation* / Q000379:methods; D007834:Lasers; D007854:Lead / Q000737:chemistry; D008422:Materials Testing / Q000295:instrumentation* / Q000379:methods*; D012680:Sensitivity and Specificity; D014025:Titanium / Q000737:chemistry; D014159:Transducers; D014732:Vibration; D015040:Zirconium / Q000737:chemistry
D020099:Coated Materials, Biocompatible; C065536:lead titanate zirconate; D007854:Lead; D015040:Zirconium; D014025:Titanium