title: Spectral polarization measurements by use of the grating division-of-amplitude photopolarimeter.
abstract: The grating division-of-amplitude photopolarimeter (G-DOAP) is an instrument that exploits the multiple-beam-splitting, polarizing, and dispersive properties of diffraction gratings for the time-resolved measurement of the complete state of polarization of collimated broadband incident light, as represented by the four Stokes parameters as a function of wavelength across the spectrum. It is a compact, high-speed sensor that has no moving parts and is simple to install and operate. These characteristics make the G-DOAP well suited for in situ spectroscopic ellipsometry (SE) applications for monitoring and controlling thin-film processes. The design and performance of a prototype instrument are presented. Precise SE measurements, to +/-0.04 degrees in psi and +/-0.1 degrees in delta, are demonstrated in the 550-940-nm wavelength range.
authors.affiliation: Containerless Research, Inc., 906 University Place, Evanston, Illinois 60201-3149, USA.
authors.forename: Shankar
authors.initials: S
authors.lastname: Krishnan
authors.forename: Scott
authors.initials: S
authors.lastname: Hampton
authors.forename: James
authors.initials: J
authors.lastname: Rix
authors.forename: Brian
authors.initials: B
authors.lastname: Taylor
authors.forename: Rasheed M A
authors.initials: RM
authors.lastname: Azzam