title: Microscopic three-dimensional topometry with ferroelectric liquid-crystal-on-silicon displays.
abstract: When three dimensional measurements are conducted with fringe projection, the quality of the grating used for the generation of the fringes is important. It has a direct influence on the achievable depth resolution in a given measurement setup. In the past, Ronchi grating or gratings written in nematic liquid-crystal displays or in digital micromirror devices have been used. We report on the application of a reflective ferroelectric liquid-crystal-on-silicon display as the fringe-generating element in a setup based on a stereo microscope. With this device the depth resolution of measurements by use of phase-shifting algorithms can be significantly improved compared with the application of a Ronchi grating or a nematic liquid-crystal display.
authors.affiliation: Institut für Technische Optik, Universität Stuttgart, Pfaffenwaldring 9, 70569 Stuttgart, Germany. proll@ito.uni-stuttgart.de
authors.forename: Klaus-Peter
authors.initials: KP
authors.lastname: Proll
authors.forename: Jean-Marc
authors.initials: JM
authors.lastname: Nivet
authors.forename: Klaus
authors.initials: K
authors.lastname: Körner
authors.forename: Hans J
authors.initials: HJ
authors.lastname: Tiziani