Measurement of thermally induced vibrations of microelectronic devices by use of a heterodyne electronic speckle pattern interferometry imaging technique.
An imaging technique to measure modulated surface displacements on microelectronic devices is presented. A device is supplied by a sinusoidal current that creates a modulated variation of temperature. To measure the induced normal surface displacement, we use an electronic speckle pattern interferometry setup in which we introduce a secondary modulation using an electro-optic modulator. To extract the displacement information, we then analyze the term atthe blinking frequency, which is equal tothe difference between the frequency of the surface displacement and the frequency of the secondary modulation. As the photodetector is a visible CC D camera, weapply heterodyne detection byusing a multichannel lock-in scheme. We have experimented with this new technique on a membrane to measure the amplitude of modulated surface displacement induced by the Joule effect.
Grauby
Stéphane
S
Centre de Physique Moléculaire Optique et Hertzienne, Université Bordeaux 1, 351 Cours de la Libération, 33405 Talence Cedex, France. sgrauby@cribx1.u-bordeaux.fr
Dilhaire
Stefan
S
Jorez
Sébastien
S
Lopez
Luis David Patino
LD
Rampnoux
Jean-Michel
JM
Claeys
Wilfrid
W