Virtual optical experiments. Part II. Design of experiments.
In Part I of this study [J. Opt. Soc. Am. A 20, 698 (2003)], we presented a physically rigorous model for simulating optical probing techniques. We now introduce the concept of virtual experiments as the fundamental strategy for analyzing the measurement techniques and for supporting the design of the experiments. Thus a theoretical study of parasitic effects, the accuracy of the experiment, and the optimum probing conditions becomes possible. In our first example of application, free-carrier absorption measurements are discussed. We present quantitative results for the optimum sample geometry and the optimum optical setup. In addition, we demonstrate that backside laser probing, a typical representative of interferometric techniques, provides excellent spatial resolution and constitutes a powerful method to detect hot spots in the investigated sample.
Thalhammer
Robert
R
Infineon Technologies, 81609 Munich, Germany. robert.thalhammer@infineon.com
Wachutka
Gerhard
G