title: Laser micromachining.
abstract: Laser micromachining can be the key to further miniaturisation of devices. This article describes the different techniques for precision removal of material.
authors.affiliation: Oxford Lasers, Didcot, UK. andrew.kearsley@oxfordlasers.com
authors.forename: Andrew
authors.initials: A
authors.lastname: Kearsley
mesh_terms: D002516:Ceramics; D004867:Equipment Design / Q000379:methods* / Q000639:trends; D007834:Lasers; D008420:Manufactured Materials; D008670:Metals; D008904:Miniaturization / Q000295:instrumentation* / Q000379:methods*; D010969:Plastics; D011786:Quality Control; D013499:Surface Properties
chemical_list: D008670:Metals; D010969:Plastics