title: Electrostatic micromachine scanning mirror for optical coherence tomography.
abstract: Compact electrostatic micromirror structures for use in the scanning arm of an optical coherence tomography (OCT) system are described. These devices consist of millimeter-scale mirrors resting upon micrometer-scale polyimide hinges that are tilted by a linear micromachine actuator, the integrated force array (IFA). The IFA is a network of deformable capacitor cells that electrostatically contract with an applied voltage. The support structures, hinges, and actuators are fabricated by photolithography from polyimide-upon-silicon wafers. These devices were inserted into the scanning arm of an experimental OCT imaging system to produce in vitro and in vivo images at frame rates of 4 to 8 Hz.
authors.affiliation: Department of Electrical and Computer Engineering, George Washington University, Washington, D.C. 20052, USA. jzara@gwu.edu
authors.forename: J M
authors.initials: JM
authors.lastname: Zara
authors.forename: S
authors.initials: S
authors.lastname: Yazdanfar
authors.forename: K D
authors.initials: KD
authors.lastname: Rao
authors.forename: J A
authors.initials: JA
authors.lastname: Izatt
authors.forename: S W
authors.initials: SW
authors.lastname: Smith
mesh_terms: D004560:Electricity; D014054:Tomography / Q000295:instrumentation*