Plasma production by helicon and slow waves.
The observation of slow-wave sustained (SW) discharge in a whistler- or helicon-wave range of frequency is made using high-frequency and very-high-frequency bands of rf. The SW discharge occurs at an extremely low rf power and plasma density, which are lower than a capacitive-coupling discharge region.
Sakawa
Youichi
Y
Department of Energy Engineering and Science, Nagoya University, Nagoya 464-8603, Japan. g44210a@nucc.cc.nagoya-u.ac.jp
Kunimatsu
Hiroyuki
H
Kikuchi
Hideki
H
Fukui
Yasuaki
Y
Shoji
Tatsuo
T