Wideband high-frequency line-focus PVDF transducer for materials characterization.
This paper presents the design, fabrication, operating characteristics and applications of a wideband, high-frequency, line-focus beam transducer we constructed using a 9 microm thick piezoelectric polyvinylidene fluoride (PVDF) film. This transducer possesses a focal length of 2.38 mm and an aperture angle of 84 degrees. The frequency spectrum of the signal measured at the focal point indicates that the transducer has a wide frequency response which extends from 10 MHz to over 100 MHz. When compensated for the frequency-dependent attenuation of the coupling medium, the operational frequency exceeds 150 MHz. The transducer can be operated in a time-resolved pulse mode or in a radio-frequency (rf) tone burst mode. An application of the transducer to determine the anisotropic elastic property of a silicon wafer is demonstrated. The phase velocities of surface acoustic waves (SAW) propagating along various directions on the (001) surface of cubic silicon are measured and compared to computed values.
Department of Theoretical and Applied Mechanics, Cornell University, Ithaca, NY 14853, USA. zouwei@us.ibm.com
Wei
W
Zou
Steve
S
Holland
Kwang Yul
KY
Kim
Wolfgang
W
Sachse