Piezoelectric ultrasonic micromotor with 1.5 mm diameter.
A piezoelectric ultrasonic micromotor has been developed using a lead zirconate titanate (PZT) ceramic/metal composite tube stator that was 1.5 mm in diameter and 7 mm in length. The micromotor was operated in its first bending vibration mode (approximately 70 kHz), producing speeds from hundreds to over 2000 rpm in both rotational directions. The maximum torque-output was 45 microN-m, which is far superior to previous PZT thin film-based micromotors. This micromotor showed good reliability and stability for more than 300 hours of continued operation.
Dong
Shuxiang
S
International Center for Transducers and Actuators/Materials Research Institute, The Pennsylvania State University, University Park, PA 16802, USA. dongsx@hotmail.com
Lim
Siak P
SP
Lee
Kwork H
KH
Zhang
Jingdong
J
Lim
Leong C
LC
Uchino
Kenji
K