title: Digital CMOS sensor chips for media-isolated liquid flow sensing.
abstract: New digital sensor technology that comes from semiconductor engineering enables media-isolated and extremely precise measurement of small mass flows in medical devices. The capabilities and potential of this technology are described.
authors.affiliation: Sensirion AG, Zurich, Switzerland. info@sensirion.com
authors.forename: U
authors.initials: U
authors.lastname: Kanne
mesh_terms: D000703:Analog-Digital Conversion; D004582:Electronics, Medical; D004867:Equipment Design; D008904:Miniaturization; D011786:Quality Control; D012212:Rheology / Q000295:instrumentation* / Q000379:methods; D012666:Semiconductors; D012815:Signal Processing, Computer-Assisted; D012996:Solutions; D014159:Transducers
chemical_list: D012996:Solutions