Simulation of depolarization effect by a rough surface for spectroscopic ellipsometry.
We employed the integral equation method (IEM) to simulate optical scattering by a randomly rough surface for spectroscopic ellipsometry. An explicit Mueller-matrix expression of the IEM for single scattering by moderately small surface roughness makes it possible to calculate the depolarization effect. The IEM allows a relatively rigorous assessment of the surface-scattering effect in a wide spectral range.
Jun
Kyung Hoon
KH
Department of Electrical Engineering and Computer Science, Korea Advanced Institute of Science and Technology, 373-1 Guseong-dong, Yuseong-gu, Daejeon 305-701, Korea. samuel@mail.kaist.ac.kr
Kwak
Joong Hwan
JH
Lim
Koeng Su
KS