title: Optimised cantilever biosensor with piezoresistive read-out.
abstract: We present a cantilever-based biochemical sensor with piezoresistive read-out which has been optimised for measuring surface stress. The resistors and the electrical wiring on the chip are encapsulated in low-pressure chemical vapor deposition (LPCVD) silicon nitride, so that the chip is well suited for operation in liquids. The wiring is titanium silicide which-in contrast to conventional metal wiring-is compatible with the high-temperature LPCVD coating process.
authors.affiliation: Mikroelektronik Centret (MIC), Technical University of Denmark, Building 345E, 2800 Kgs., Lyngby, Denmark. pra@mic.dtu.dk
authors.forename: P A
authors.initials: PA
authors.lastname: Rasmussen
authors.forename: J
authors.initials: J
authors.lastname: Thaysen
authors.forename: O
authors.initials: O
authors.lastname: Hansen
authors.forename: S C
authors.initials: SC
authors.lastname: Eriksen
authors.forename: A
authors.initials: A
authors.lastname: Boisen