title: A review of recent work in sub-nanometre displacement measurement using optical and X-ray interferometry.
abstract: This paper reviews recent work in the field of displacement measurement using optical and X-ray interferometry at the sub-nanometre level of accuracy. The major sources of uncertainty in optical interferometry are discussed and a selection of recent designs of ultra-precise, optical-interferometer-based, displacement measuring transducers presented. The use of X-ray interferometry and its combination with optical interferometry is discussed.
authors.affiliation: Centre for Basic, Thermal and Length Metrology, National Physical Laboratory, Queens Road, Teddington TW11 0LW, UK.
authors.forename: G N
authors.initials: GN
authors.lastname: Peggs
authors.forename: A
authors.initials: A
authors.lastname: Yacoot
mesh_terms: D007368:Interferometry / Q000295:instrumentation / Q000379:methods; D008857:Microscopy, Interference / Q000295:instrumentation / Q000379:methods*; D009038:Motion; D036103:Nanotechnology / Q000295:instrumentation / Q000379:methods*; D014961:X-Ray Diffraction / Q000295:instrumentation / Q000379:methods*