title: Simulation of depolarization effect by a rough surface for spectroscopic ellipsometry.
abstract: We employed the integral equation method (IEM) to simulate optical scattering by a randomly rough surface for spectroscopic ellipsometry. An explicit Mueller-matrix expression of the IEM for single scattering by moderately small surface roughness makes it possible to calculate the depolarization effect. The IEM allows a relatively rigorous assessment of the surface-scattering effect in a wide spectral range.
authors.affiliation: Department of Electrical Engineering and Computer Science, Korea Advanced Institute of Science and Technology, 373-1 Guseong-dong, Yuseong-gu, Daejeon 305-701, Korea. samuel@mail.kaist.ac.kr
authors.forename: Kyung Hoon
authors.initials: KH
authors.lastname: Jun
authors.forename: Joong Hwan
authors.initials: JH
authors.lastname: Kwak
authors.forename: Koeng Su
authors.initials: KS
authors.lastname: Lim