title: A versatile multipurpose scanning probe microscope.
abstract: A combined scanning probe microscope has been developed that allows simultaneous operation as a non-contact/tapping mode atomic force microscope, a scattering near-field optical microscope, and a scanning tunnelling microscope on conductive samples. The instrument is based on a commercial optical microscope. It operates with etched tungsten tips and exploits a tuning fork detection system for tip/sample distance control. The system has been tested on a p-doped silicon substrate with aluminium depositions, being able to discriminate the two materials by the electrical and optical images with a lateral resolution of 130 nm.
authors.affiliation: INFM, Università di Messina, Salita Sperone 31, I-98166 Messina, Italy.
authors.forename: E
authors.initials: E
authors.lastname: Cefalì
authors.forename: S
authors.initials: S
authors.lastname: Patanè
authors.forename: P G
authors.initials: PG
authors.lastname: Gucciardi
authors.forename: M
authors.initials: M
authors.lastname: Labardi
authors.forename: M
authors.initials: M
authors.lastname: Allegrini