title: Nanostructured silicon surfaces via nanoporous alumina.
abstract: Nanostructured silicon surfaces are generated using nanoporous alumina membranes as stamps to imprint PMMA films on silicon, followed by reactive ion etching (RIE).
authors.affiliation: Institut für Anorganische Chemie, Universität Essen, Universitätsstr. 5-7, 45117 Essen, Germany.
authors.forename: Matthias
authors.initials: M
authors.lastname: Kruse
authors.forename: Steffen
authors.initials: S
authors.lastname: Franzka
authors.forename: Günter
authors.initials: G
authors.lastname: Schmid