Frequency interference between two mesa-shaped quartz crystal microbalances.
The multichannel quartz crystal microbalance (MQCM) is very attractive for biosensor applications. The principle of the MQCM design involves fabricating arrays of quartz microbalances on a single substrate, and it is important that the individual sensor performance is not influenced by the neighboring devices. Feasible ways to control the coupling of acoustical energy within a MQCM structure are to increase the difference in the resonance frequency between the electroded and unelectroded portions of the substrate; and a practical way to achieve this is to use mesa structures. In this paper, the frequency interference between two mesa-shaped quartz crystal microbalances is investigated using Mindlin's theory. The results show that even a very small mesa height (approximately 5% of the plate thickness) can greatly reduce the frequency interference and more effectively trap the acoustic energy. This allows for a broader design window and higher packing density for MQCM applications.
Shen
Feng
F
Institute of High Performance Computing, The Capricorn, Singapore Science Park II, Singapore 117528. shenf@ihpc.a-star.edu.sg
O'Shea
Sean J
SJ
Lee
Kwok H
KH
Lu
Pin
P
Ng
Teng Y
TY
D015374:Biosensing Techniques / Q000295:instrumentation / Q000379:methods*; D003198:Computer Simulation; D003460:Crystallization; D003461:Crystallography / Q000295:instrumentation / Q000379:methods*; D004548:Elasticity; D004735:Energy Transfer; D004867:Equipment Design / Q000379:methods; D019544:Equipment Failure Analysis / Q000379:methods; D008962:Models, Theoretical; D036103:Nanotechnology / Q000295:instrumentation / Q000379:methods; D011791:Quartz / Q000737:chemistry*; D015203:Reproducibility of Results; D012680:Sensitivity and Specificity; D013314:Stress, Mechanical; D014159:Transducers
D011791:Quartz