Nanostructured silicon surfaces via nanoporous alumina.
Nanostructured silicon surfaces are generated using nanoporous alumina membranes as stamps to imprint PMMA films on silicon, followed by reactive ion etching (RIE).
Kruse
Matthias
M
Institut für Anorganische Chemie, Universität Essen, Universitätsstr. 5-7, 45117 Essen, Germany.
Franzka
Steffen
S
Schmid
Günter
G