Thin-disc piezoceramic ultrasonic motor. Part II: system construction and control.
Design and performance evaluation of an ultrasonic motor was discussed in [Wen et al., Thin-disc piezoelectric ultrasonic motor. Part I: design and performance evaluation, Ultrasonics]. Higher precision position control of piezoceramic ultrasonic motor depends on mechanical design and servo control of a very precise and adequate metrology. This paper proposes the design of a driving circuit and controller to deal with non-linearities behavior in the model of piezoceramic-driving ultrasonic motor. The performance of the driver and the effectiveness of the proposed controller are demonstrated by command inputs of sinusoidal and step signals. For comparison purpose, the ultrasonic motor is controlled using two methods: i.e., proportional-integral-derivative (PID) and sliding-mode control (SMC). It was proven that SMC would compensate automatically for unmodeled behaviors such as piezoceramic non-linearities and mechanical stick-slip phenomena. Furthermore, SMC scheme has been successfully applied to position tracking to demonstrate the excellent robust performance in noise rejection.
Yen
Chi Yung
CY
Department of Engineering and System Science, National Tsing-Hua University, 30043, Hsinchu, Taiwan. bill@mail.nlhu.edu.tw
Wen
Fuh Liang
FL
Ouyang
Minsun
M
D002516:Ceramics; D004560:Electricity; D004867:Equipment Design; D006801:Humans; D014465:Ultrasonics