Optimized staircase profiles for diffractive optical devices made from absorbing materials.
We report on the optimization of staircase grating profiles for the case of absorbing grating materials. Using a simple numerical algorithm, we determined the grating parameters, maximizing the first-order diffraction efficiency for different numbers of staircase steps. The results show that there is a significant difference between the staircase profiles for nonnegligible and negligible absorption. The obtained solutions are of importance for diffractive optics in the soft-x-ray and extreme-ultraviolet ranges.
Nöhammer
Bernd
B
Laboratory for Micro- and Nanotechnology, Paul Scherrer Institut, CH-5232 Villigen, Switzerland. bernd.noehammer@psi.ch
David
Christian
C
Gobrecht
Jens
J
Herzig
Hans Peter
HP