Polarization conversion from highly conducting, asymmetric trapezoidal gratings.
The differences in the curves of the zeroth-order cross-polarization reflection coeffients (p --> s and s --> p) versus angle of incidence have remarkable potential for application in scatterometry because, if the differences are larger than the measurement error, they could contribute to a reliable nondestructive technique for detecting asymmetries in grating profiles. The cross-polarization efficiencies of highly conducting metallic gratings with asymmetric trapezoidal profiles are investigated theoretically by means of a rigorous electromagnetic code. The results show that the differences between p --> s and s --> p conversion tend to be undetectable for highly conducting materials, a fact that limits, in principle, the application of this potential detection technique.
Depine
Ricardo A
RA
Grupo de Electromagnetismo Aplicado, Departamento de Física, Facultad de Ciencias Exactas y Naturales, Universidad de Buenos Aires, Ciudad Universitaria, Pabellón I, 1428 Buenos Aires, Argentina.
Inchaussandague
Marina E
ME