Three-dimensional micro-optical components embedded in photosensitive glass by a femtosecond laser.
We show that three-dimensional micro-optical components can be embedded in a photosensitive glass by a femtosecond (fs) laser. After exposure to the tightly focused fs laser beam, latent images are written inside the sample. Modified regions are developed by a postbaking process and then preferentially etched away in a 10%-dilute solution of hydrofluoric acid. After this process, hollow internal structures are formed that act as a mirror and a beam splitter. Furthermore, we find that postannealing smoothes the surfaces of the fabricated hollow structures, resulting in great improvement of their optical properties.
Cheng
Ya
Y
RIKEN, The Institute of Physical and Chemical Research, Hirosawa 2-1, Wako, Saitama 351-0198, Japan. ycheng@postman.riken.go.jp
Sugioka
Koji
K
Midorikawa
Katsumi
K
Masuda
Masashi
M
Toyoda
Koichi
K
Kawachi
Masako
M
Shihoyama
Kazuhiko
K