title: Three-dimensional micro-optical components embedded in photosensitive glass by a femtosecond laser.
abstract: We show that three-dimensional micro-optical components can be embedded in a photosensitive glass by a femtosecond (fs) laser. After exposure to the tightly focused fs laser beam, latent images are written inside the sample. Modified regions are developed by a postbaking process and then preferentially etched away in a 10%-dilute solution of hydrofluoric acid. After this process, hollow internal structures are formed that act as a mirror and a beam splitter. Furthermore, we find that postannealing smoothes the surfaces of the fabricated hollow structures, resulting in great improvement of their optical properties.
authors.affiliation: RIKEN, The Institute of Physical and Chemical Research, Hirosawa 2-1, Wako, Saitama 351-0198, Japan. ycheng@postman.riken.go.jp
authors.forename: Ya
authors.initials: Y
authors.lastname: Cheng
authors.forename: Koji
authors.initials: K
authors.lastname: Sugioka
authors.forename: Katsumi
authors.initials: K
authors.lastname: Midorikawa
authors.forename: Masashi
authors.initials: M
authors.lastname: Masuda
authors.forename: Koichi
authors.initials: K
authors.lastname: Toyoda
authors.forename: Masako
authors.initials: M
authors.lastname: Kawachi
authors.forename: Kazuhiko
authors.initials: K
authors.lastname: Shihoyama