Method for measuring the refractive index and the thickness of transparent plates with a lateral-shear, wavelength-scanning interferometer.
A new method for measuring simultaneously the thickness and the refractive index of a transparent plate is proposed. The method is based on a simple, variable lateral-shear, wavelength-scanning interferometer. To achieve highly accurate measurements of both refractive index n and thickness d we use several means to determine these two quantities. We finely tune a distributed-feedback diode laser light source to introduce a phase shift into the detected signal, whereas we make the sample rotate to produce variable lateral shearing. Phase shifting permits precise determination of the optical thickness, nd, whereas refractive index n is obtained from the retrieved phase of the overall interference signal for all incidence angles.
Coppola
Giuseppe
G
Istituto per la Microelettronica e i Microsistemi, del Consiglio Nazionale delle Ricerche, Sezione di Napoli, Via P. Castellino, 111, 80131 Naples, Italy. giuseppe.coppola@imm.cnr.it
Ferraro
Pietro
P
Iodice
Mario
M
De Nicola
Sergio
S