title: Optimization of EDX performance in Tecnai TEMs.
abstract: The quality of X-ray spectra from FEGTEMs has been improved by three different means: the use of beryllium shields, improved collimation and improved specimen holder geometry. The improvements lead to a significant increase in peak-to-background ratios and a reduction in spurious peaks in the EDX spectra. A double-tilt, low-background specimen holder was designed to allow EDX analysis at 0 degrees of tilt without shadowing.
authors.affiliation: FEI Electron Optics, P.O. Box 218, 5600KE Eindhoven, The Netherlands. sebastian.von.harrach@nl.feico.com
authors.forename: H S
authors.initials: HS
authors.lastname: von Harrach
authors.forename: B
authors.initials: B
authors.lastname: Freitag
authors.forename: W
authors.initials: W
authors.lastname: Gerits
authors.forename: A
authors.initials: A
authors.lastname: Sandborg