Optimization of EDX performance in Tecnai TEMs.
The quality of X-ray spectra from FEGTEMs has been improved by three different means: the use of beryllium shields, improved collimation and improved specimen holder geometry. The improvements lead to a significant increase in peak-to-background ratios and a reduction in spurious peaks in the EDX spectra. A double-tilt, low-background specimen holder was designed to allow EDX analysis at 0 degrees of tilt without shadowing.
von Harrach
H S
HS
FEI Electron Optics, P.O. Box 218, 5600KE Eindhoven, The Netherlands. sebastian.von.harrach@nl.feico.com
Freitag
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B
Gerits
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Sandborg
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