High-resolution spectrum of xenon ions at 13.4 nm.
The spectrum of xenon excited in a low-inductance vacuum spark was photographed at high resolution in the region of 9.5-15.5 nm. The observed transitions were identified as belonging to ions from Xe8+ to Xe13+. In the region of importance for extreme-ultraviolet lithography around 13.4 nm, the strongest lines were identified as 4d8-4d7 5p transitions in Xe10+. The identifications were made by use of energy parameters extrapolated along the isoelectronic sequence.
Churilov
Sergei
S
National Institute of Standards and Technology, Gaithersburg, Maryland 20899, USA.
Joshi
Yogi N
YN
Reader
Joseph
J