title: [The mean energy of electron determined by atomic hydrogen emission line in EACVD].
abstract: The process of atomic hydrogen emission in EACVD is simulated by Monte Carlo method. A method of determining the mean energy of electron is given by the ratio of atomic hydrogen emission line. The result is of great importance to determining the mean energy of electron in situ in the process of diamond film deposited by EACVD. Then, high quality diamond films can be obtained by controlling the conditions of technology efficiently.
authors.affiliation: College of Physics Science and Technology, Hebei University, Baoding 071002, China.
authors.forename: Li-fang
authors.initials: LF
authors.lastname: Dong
authors.forename: Yu-hong
authors.initials: YH
authors.lastname: Zhang
mesh_terms: D055598:Chemical Phenomena; D002627:Chemistry, Physical; D003198:Computer Simulation; D018130:Diamond; D004583:Electrons; D004735:Energy Transfer; D006859:Hydrogen / Q000737:chemistry*; D009010:Monte Carlo Method; D017785:Photons; D013054:Spectrophotometry, Atomic / Q000379:methods
chemical_list: D018130:Diamond; D006859:Hydrogen