Effect of humidity treatments on porosity and mechanical integrity of mesoporous silica films.
The beneficial effects humidity treatments have on molecularly templated mesoporous silica films with respect to elastic modulus, with minimal detrimental effects on porosity and dielectric constant, were identified.
Li
Xiaohong
X
Pacific Northwest National Laboratory, MSIN: K2-44, P.O. Box 999, Richland, WA, USA.
Birnbaum
Jerome C
JC
Williford
Rick E
RE
Fryxell
Glen E
GE
Coyle
Chris A
CA
Dunham
Glen C
GC
Baskaran
Suresh
S