Effects of trace metals and organic additives on porosity and dielectric constant of high purity mesoporous silica films.
The beneficial effects that alkali metal and alkylammonium salt additions to molecularly templated silica sols have on the resulting mesoporous silica films formed from evaporative-coating methods with respect to porosity, elastic modulus, dielectric constant, and film surface uniformity were investigated and identified.
Birnbaum
Jerome C
JC
Pacific Northwest National Laboratory, MSIN: K2-44, P.O. Box 999, Richland, WA, USA. jerome.birnbaum@pnl.gov
Fryxell
Glen E
GE
Li
Xiaohong
X
Coyle
Chris A
CA
Dunham
Glen C
GC
Baskaran
Suresh
S
D001665:Binding Sites; D004563:Electrochemistry / Q000379:methods; D008956:Models, Chemical; D009930:Organic Chemicals / Q000737:chemistry*; D009942:Organometallic Compounds / Q000737:chemistry*; D016062:Porosity; D011188:Potassium / Q000737:chemistry; D000644:Quaternary Ammonium Compounds / Q000737:chemistry; D012822:Silicon Dioxide / Q000737:chemistry*; D013499:Surface Properties; D014131:Trace Elements / Q000737:chemistry*
D009930:Organic Chemicals; D009942:Organometallic Compounds; D000644:Quaternary Ammonium Compounds; D014131:Trace Elements; D012822:Silicon Dioxide; C027917:tetramethylammonium; D011188:Potassium