[The mean energy of electron determined by atomic hydrogen emission line in EACVD].
The process of atomic hydrogen emission in EACVD is simulated by Monte Carlo method. A method of determining the mean energy of electron is given by the ratio of atomic hydrogen emission line. The result is of great importance to determining the mean energy of electron in situ in the process of diamond film deposited by EACVD. Then, high quality diamond films can be obtained by controlling the conditions of technology efficiently.
Dong
Li-fang
LF
College of Physics Science and Technology, Hebei University, Baoding 071002, China.
Zhang
Yu-hong
YH
D055598:Chemical Phenomena; D002627:Chemistry, Physical; D003198:Computer Simulation; D018130:Diamond; D004583:Electrons; D004735:Energy Transfer; D006859:Hydrogen / Q000737:chemistry*; D009010:Monte Carlo Method; D017785:Photons; D013054:Spectrophotometry, Atomic / Q000379:methods
D018130:Diamond; D006859:Hydrogen