title: [Spectral measuring of Fourier transform spectrometer using pneumatic hydraulic servo system].
abstract: The importance of driving mirror smoothly used in Fourier transform spectrometer (FTS) is discussed. We have designed and used high precision pneumatic hydraulic servo system to move "cat-eyes" optical system in FTS. The light source spectrum of ZYGO interferometer is measured by use of this system.
authors.affiliation: State Key Laboratory of Applied Optics, Changchun Institute of Optics and Fine Mechanics, Chinese Academy of Science, 130022 Changchun.
authors.forename: Z
authors.initials: Z
authors.lastname: Li
authors.forename: S
authors.initials: S
authors.lastname: Wang
authors.forename: Q
authors.initials: Q
authors.lastname: Wang
authors.forename: F
authors.initials: F
authors.lastname: Li
mesh_terms: D017550:Spectroscopy, Fourier Transform Infrared / Q000295:instrumentation* / Q000379:methods