title: Effect of humidity treatments on porosity and mechanical integrity of mesoporous silica films.
abstract: The beneficial effects humidity treatments have on molecularly templated mesoporous silica films with respect to elastic modulus, with minimal detrimental effects on porosity and dielectric constant, were identified.
authors.affiliation: Pacific Northwest National Laboratory, MSIN: K2-44, P.O. Box 999, Richland, WA, USA.
authors.forename: Xiaohong
authors.initials: X
authors.lastname: Li
authors.forename: Jerome C
authors.initials: JC
authors.lastname: Birnbaum
authors.forename: Rick E
authors.initials: RE
authors.lastname: Williford
authors.forename: Glen E
authors.initials: GE
authors.lastname: Fryxell
authors.forename: Chris A
authors.initials: CA
authors.lastname: Coyle
authors.forename: Glen C
authors.initials: GC
authors.lastname: Dunham
authors.forename: Suresh
authors.initials: S
authors.lastname: Baskaran