[Spectral measuring of Fourier transform spectrometer using pneumatic hydraulic servo system].
The importance of driving mirror smoothly used in Fourier transform spectrometer (FTS) is discussed. We have designed and used high precision pneumatic hydraulic servo system to move "cat-eyes" optical system in FTS. The light source spectrum of ZYGO interferometer is measured by use of this system.
Li
Z
Z
State Key Laboratory of Applied Optics, Changchun Institute of Optics and Fine Mechanics, Chinese Academy of Science, 130022 Changchun.
Wang
S
S
Wang
Q
Q
Li
F
F
D017550:Spectroscopy, Fourier Transform Infrared / Q000295:instrumentation* / Q000379:methods