title: Hartmann wave-front measurement at 13.4 nm with lambdaEUV/120 accuracy.
abstract: We report, for the first time to our knowledge, experimental demonstration of wave-front analysis via the Hartmann technique in the extreme ultraviolet range. The reference wave front needed to calibrate the sensor was generated by spatially filtering a focused undulator beam with 1.7- and 0.6-microm-diameter pinholes. To fully characterize the sensor, accuracy and sensitivity measurements were performed. The incident beam's wavelength was varied from 7 to 25 nm. Measurements of accuracy better than lambdaEUV/120 (0.11 nm) were obtained at lambdaEUV = 13.4 nm. The aberrations introduced by an additional thin mirror, as well as wave front of the spatially unfiltered incident beam, were also measured.
authors.affiliation: Laboratoire d'Interaction du Rayonnement X avec la Matière, Bâtiment 350, Université Paris-Sud, 91405 Orsay, France. mercere@enstay.ensta.fr
authors.forename: Pascal
authors.initials: P
authors.lastname: Mercère
authors.forename: Philippe
authors.initials: P
authors.lastname: Zeitoun
authors.forename: Mourad
authors.initials: M
authors.lastname: Idir
authors.forename: Sébastien
authors.initials: S
authors.lastname: Le Pape
authors.forename: Denis
authors.initials: D
authors.lastname: Douillet
authors.forename: Xavier
authors.initials: X
authors.lastname: Levecq
authors.forename: Guillaume
authors.initials: G
authors.lastname: Dovillaire
authors.forename: Samuel
authors.initials: S
authors.lastname: Bucourt
authors.forename: Kenneth A
authors.initials: KA
authors.lastname: Goldberg
authors.forename: Patrick P
authors.initials: PP
authors.lastname: Naulleau
authors.forename: Senajith
authors.initials: S
authors.lastname: Rekawa