Digital phase-shifting interferometer with an electrically addressed liquid-crystal spatial light modulator.
A digital phase-shifting interferometer with a liquid-crystal-display coupled, parallel aligned, nematic liquid-crystal spatial light modulator is developed. The optical phase shift in the Michelson-type polarization interferometer is achieved by a digital phase shift of a grating displayed on the spatial light modulator. Accurate experimental results of using the heterodyne system for pi/2 phase steps were demonstrated. A phase-shifting interferometer with no moving parts and no requirement for calibration of the value of the phase shift was achieved.
Bitou
Youichi
Y
National Institute of Advanced Industrial Science and Technology, AIST Tsukuba Central 3, 1-1-1 Umezono, Tsukuba, Ibaraki 305-8563, Japan. y-bitou@aist.go.jp