Thickness-dependent leakage current of (polyvinylidene fluoride/lead titanate) pyroelectric detectors.
The novel pyroelectric IR detectors have been fabricated using the Polyvinylidene Fluoride (PVDF)/Lead Titanate (PT) pyroelectric bilayer thin films, which were deposited onto Pt(111)/SiO2/Si(100) substrates by a sol-gel process. The ceramic/polymer structure was constructed of the randomly oriented polycrystalline PT film (approximately 1 microm) heated at 700 degrees C for 1 h and the beta-phase PVDF film crystallized at 65 degrees C for 2 h. The effects of PVDF thin film thickness (100 approximately 580 nm) on the pyroelectric response of IR detectors were studied. The results show that the depositions of PVDF thin films onto the PT films will cause the leakage current (J) of the detectors decrease from 6.37 x 10(-7) A/cm2 to 3.86 x 10(-7) A/cm2. The specific detectivity (D*) measured at 100 Hz decreased from 2.72 x 10(7) cm x Hz(1/2)/W for detector without PVDF to 1.71 x 10(7) cm x Hz(1/2)/W for detector with PVDF thickness of 580 nm. By optimizing the ratio of the specific detectivity (D*) to leakage current, D*/J, the detector with PVDF thickness of 295 nm exhibits the best performance.
Kao
Ming-Cheng
MC
Department of Electrical Engineering and Semiconductor Technology Research and Development Center, National Sun Yat-Sen University, Kaohsiung, Taiwan.
Wang
Chih-Ming
CM
Chen
Hone-Zern
HZ
Lee
Maw-Shung
MS
Chen
Ying-Chung
YC