[Raman spectra and XPS analyses of the diamond-like carbon film deposited by surface wave plasma].
Raman spectrum and X-ray photoelectron spectroscopy (XPS) were used for the structural analysis of diamond-like carbon (DLC) film deposited by surface wave plasma. Decomposition methods were used respectively to achieve the quantitative measurement of sp3 content of the films deposited under different working times. We obtained the result that the sp3 bonding of the films was in the range of 20%-40% and increased with the depositing time by using both analysis methods.
Huang
Wei-dong
WD
Structure Research Laboratory, Chinese Academy of Sciences, Department of Modern Physics, University of Science and Technology of China, Hefei 230026, China.
Zhan
Ru-juan
RJ
D002244:Carbon / Q000737:chemistry*; D018130:Diamond / Q000737:chemistry*; D013052:Spectrometry, X-Ray Emission; D013059:Spectrum Analysis, Raman
D002244:Carbon; D018130:Diamond