title: Determination of ultra trace level metallic impurities in semiconductor materials by ICP-MS.
authors.affiliation: Agilent Technologies Inc., Blk A, #03-07/12 Alexandra Technopark, 438A Alexandra Road, Singapore 119967.
authors.forename: K
authors.initials: K
authors.lastname: Kawabata
authors.forename: Y
authors.initials: Y
authors.lastname: Mu
authors.forename: K
authors.initials: K
authors.lastname: Mizobuchi
mesh_terms: D013058:Mass Spectrometry / Q000379:methods; D008673:Metals, Alkaline Earth / Q000032:analysis*; D012666:Semiconductors; D013054:Spectrophotometry, Atomic / Q000379:methods*; D014131:Trace Elements / Q000032:analysis*
chemical_list: D008673:Metals, Alkaline Earth; D014131:Trace Elements