title: Coordination polyhedron and chemical vapor deposition of Cu(hfacac)2(t-BuNH2).
abstract: A new pentacoordinate Cu(II) complex, Cu(hfacac)(2)(t-BuNH(2)) [hfacac = CF(3)C(O)CHC(O)CF(3)(-), t-BuNH(2) = tert-butylamine], has been synthesized and structurally characterized. Interestingly, the structure of a single crystal occurred as square pyramidal with one O atom at the apical position and one N and three O atoms at the basal positions, showing a serious degree of distortion. This contrasts with the square-pyramidal structure of Cu(hfacac)(2)L (L = H(2)O and pyrazine), which has the L ligand at the axial position. In the Cu(hfacac)(2)(t-BuNH(2)) complex, the t-BuNH(2) ligand is placed at an equatorial position with a lowered angle by 19.9(2) degrees from the basal plane. This distortion seems to reduce sigma influence and steric hindrance and so stabilizes the square-pyramidal geometry. This precursor has a lower melting point and superior stability to air, moisture, and heat than the Cu(hfacac)(2)(xH(2)O) precursor. The deposition rate of copper oxide film on a Pt layer above 450 degrees C was nearly constant with increasing temperature, indicating a mass transport limited reaction. Therefore it would be a useful metal organic chemical vapor deposition precursor for the fabrication of copper oxide film or superconducting materials. Crystal data for Cu(hfacac)(2)(t-BuNH(2)): 293(2) K, a = 9.6699(4) A, b = 18.0831(10) A, c = 12.8864(11) A, beta = 111.839(5) degrees, monoclinic, space group P2(1)/c, Z = 4.