Suspended multiwalled carbon nanotubes as self-aligned evaporation masks.
We describe the nanofabrication study of self-aligned electrodes on suspended multiwalled carbon nanotube structures. When metal is deposited on a suspended multiwalled carbon nanotube structure, the nanotube acts as an evaporation mask, resulting in the formation of discontinuous electrodes. The metal deposits on the nanotubes are removed with lift-off. Using Al sacrificial layers, it was possible to fabricate self-aligned contact electrodes and control electrodes nanometers from the suspended carbon nanotubes with a single lithography step. It was also shown that the fabrication technique may also be used to form nano-gapped contact electrodes. The technique should prove useful for the fabrication of nano-electromechanical systems.
Lee
S B
SB
Department of Nanotechnology, Hanyang University, Seoul 133-791, Korea.
Robinson
L A
LA
Teo
K B
KB
Chhowalla
M
M
Amaratunga
G A
GA
Milne
W I
WI
Hasko
D G
DG
Ahmed
H
H
D002857:Chromium / Q000737:chemistry; D020099:Coated Materials, Biocompatible / Q000138:chemical synthesis / Q000737:chemistry*; D003460:Crystallization / Q000379:methods*; D004563:Electrochemistry / Q000295:instrumentation* / Q000379:methods; D004867:Equipment Design; D008839:Microelectrodes; D036103:Nanotechnology / Q000295:instrumentation* / Q000379:methods*; D037742:Nanotubes, Carbon / Q000737:chemistry* / Q000648:ultrastructure*
D020099:Coated Materials, Biocompatible; D037742:Nanotubes, Carbon; D002857:Chromium