Laser terahertz-emission microscope for inspecting electrical faults in integrated circuits.
A laser terahertz-emission microscope (LTEM) system is proposed and developed for inspecting electrical faults in integrated circuits (IC). We test a commercial operational amplifier while the system is operating. Two-dimensional terahertz-emission images of the IC chip are clearly observed while the chip is scanned with a femtosecond laser. When one of the interconnection lines is cut, the damaged chip has a LTEM image different from that of normal chips. The results indicate that the LTEM system is a potential tool for IC inspection.
Research Center for Superconductor Photonics, Osaka University, 2-1 Yamadaoka, Suita, Osaka 565-0871, Japan. kiwa@rcsuper.osaka-u.ac.jp
Toshihiko
T
Kiwa
Masayoshi
M
Tonouchi
Masatsugu
M
Yamashita
Kodo
K
Kawase