20-nm resolution x-ray microscopy demonstrated by use of multilayer test structures [corrected].
A spatial resolution of 20 nm is demonstrated at 2.07-nm wavelength by use of a soft x-ray microscope based on Fresnel zone plate lenses and partially coherent illumination. Nanostructural test patterns, formed by sputtered multilayer coatings and transmission electron microscopy thinning techniques, provide clear experimental results.
Center for X-ray Optics, Lawrence Berkeley National Laboratory, Berkeley, California 94720-8199, USA. wlchao@lbl.gov
Weilun
W
Chao
Erik
E
Anderson
Gregory P
GP
Denbeaux
Bruce
B
Harteneck
J Alexander
JA
Liddle
Deirdre L
DL
Olynick
Angelic L
AL
Pearson
Farhad
F
Salmassi
Cheng Yu
CY
Song
David T
DT
Attwood