20-nm resolution x-ray microscopy demonstrated by use of multilayer test structures [corrected].
A spatial resolution of 20 nm is demonstrated at 2.07-nm wavelength by use of a soft x-ray microscope based on Fresnel zone plate lenses and partially coherent illumination. Nanostructural test patterns, formed by sputtered multilayer coatings and transmission electron microscopy thinning techniques, provide clear experimental results.
Chao
Weilun
W
Center for X-ray Optics, Lawrence Berkeley National Laboratory, Berkeley, California 94720-8199, USA. wlchao@lbl.gov
Anderson
Erik
E
Denbeaux
Gregory P
GP
Harteneck
Bruce
B
Liddle
J Alexander
JA
Olynick
Deirdre L
DL
Pearson
Angelic L
AL
Salmassi
Farhad
F
Song
Cheng Yu
CY
Attwood
David T
DT