Silicon-on insulator based thin-film resistor for chemical and biological sensor applications.
Lehrstuhl für Biophysik-E22 Technische Universität München, 85747 Garching, Germany.
Michael G
MG
Nikolaides
Stephan
S
Rauschenbach
Sebastian
S
Luber
Karin
K
Buchholz
Marc
M
Tornow
Gerhard
G
Abstreiter
Andreas R
AR
Bausch
D015374:Biosensing Techniques / Q000295:instrumentation*; D002623:Chemistry Techniques, Analytical / Q000295:instrumentation*; D004867:Equipment Design; D012825:Silicon / Q000737:chemistry*; D013499:Surface Properties
D012825:Silicon