Silicon-on insulator based thin-film resistor for chemical and biological sensor applications.
Nikolaides
Michael G
MG
Lehrstuhl für Biophysik-E22 Technische Universität München, 85747 Garching, Germany.
Rauschenbach
Stephan
S
Luber
Sebastian
S
Buchholz
Karin
K
Tornow
Marc
M
Abstreiter
Gerhard
G
Bausch
Andreas R
AR
D015374:Biosensing Techniques / Q000295:instrumentation*; D002623:Chemistry Techniques, Analytical / Q000295:instrumentation*; D004867:Equipment Design; D012825:Silicon / Q000737:chemistry*; D013499:Surface Properties
D012825:Silicon