title: First results on label-free detection of DNA and protein molecules using a novel integrated sensor technology based on gravimetric detection principles.
abstract: A novel integrated bio-sensor technology based on thin-film bulk acoustic wave resonators on silicon is presented and the feasibility of detecting DNA and protein molecules proofed. The detection principle of these sensors is label-free and relies on a resonance frequency shift caused by mass loading of an acoustic resonator, a principle very well known from quartz crystal micro balances. Integrated ZnO bulk acoustic wave resonators with resonance frequencies around 2 GHz have been fabricated, employing an acoustic mirror for isolation from the silicon substrate. DNA oligos have been thiol-coupled to the gold electrode by on-wafer dispensing. In a further step, samples have either been hybridised or alternatively a protein has been coupled to the receptor. The measurement results show the new bio-sensor being capable of both, detecting proteins as well as the DNA hybridisation without using a label. Due to the substantially higher oscillation frequency, these sensors already show much higher sensitivity and resolution comparable to quartz crystal micro balances. The potential for these sensors and sensors arrays as well as technological challenges will be discussed in detail.
authors.affiliation: Siemens AG, Corporate Technology, Otto-Hahn-Ring 6, 81739 Munich, Germany. reinhard.gabl@seimens.com
authors.forename: R
authors.initials: R
authors.lastname: Gabl
authors.forename: H-D
authors.initials: HD
authors.lastname: Feucht
authors.forename: H
authors.initials: H
authors.lastname: Zeininger
authors.forename: G
authors.initials: G
authors.lastname: Eckstein
authors.forename: M
authors.initials: M
authors.lastname: Schreiter
authors.forename: R
authors.initials: R
authors.lastname: Primig
authors.forename: D
authors.initials: D
authors.lastname: Pitzer
authors.forename: W
authors.initials: W
authors.lastname: Wersing
mesh_terms: D015374:Biosensing Techniques / Q000295:instrumentation* / Q000379:methods; D020099:Coated Materials, Biocompatible / Q000138:chemical synthesis / Q000737:chemistry; D004247:DNA / Q000032:analysis*; D004563:Electrochemistry / Q000295:instrumentation*; D004566:Electrodes; D004867:Equipment Design; D019544:Equipment Failure Analysis; D005240:Feasibility Studies; D006112:Gravitation; D017403:In Situ Hybridization / Q000295:instrumentation* / Q000379:methods; D010865:Pilot Projects; D040081:Protein Array Analysis / Q000295:instrumentation* / Q000379:methods; D011506:Proteins / Q000032:analysis*; D015203:Reproducibility of Results; D012680:Sensitivity and Specificity; D013194:Staining and Labeling; D019809:Streptavidin / Q000032:analysis; D013314:Stress, Mechanical; D018511:Systems Integration
chemical_list: D020099:Coated Materials, Biocompatible; D011506:Proteins; D004247:DNA; D019809:Streptavidin