Unidirectional SAW transducer for gigahertz frequencies.
A single-phase unidirectional transducer (SPUDT) structure using lambda/4 and wider electrodes is introduced. The considerable difference between the reflectivity of short-circuited lambda/4 electrodes and that of floating lambda/2-wide electrodes on 128 degree lithium niobate (LiNbO3) is exploited. The surface acoustic wave (SAW) device operating at 2.45 GHz has critical dimensions of about 0.4 microm, accessible for standard optical lithography.
Lehtonen
Saku
S
Plessky
Victor P
VP
Hartmann
Clinton S
CS
Salomaa
Martti M
MM