title: Development of parametric material, energy, and emission inventories for wafer fabrication in the semiconductor industry.
abstract: Currently available data suggest that most of the energy and material consumption related to the production of an integrated circuit is due to the wafer fabrication process. The complexity of wafer manufacturing, requiring hundreds of steps that vary from product to product and from facility to facility and which change every few years, has discouraged the development of material, energy, and emission inventory modules for the purpose of insertion into life cycle assessments. To address this difficulty, a flexible, process-based system for estimating material requirements, energy requirements, and emissions in wafer fabrication has been developed. The method accounts for mass and energy use atthe unit operation level. Parametric unit operation modules have been developed that can be used to predict changes in inventory as the result of changes in product design, equipment selection, or process flow. A case study of the application of the modules is given for energy consumption, but a similar methodology can be used for materials, individually or aggregated.
authors.affiliation: Center for Energy and Environmental Resources (R7100), University of Texas, Austin, Texas 78758, USA. cfmurphy@mail.utexas.edu
authors.forename: Cynthia F
authors.initials: CF
authors.lastname: Murphy
authors.forename: George A
authors.initials: GA
authors.lastname: Kenig
authors.forename: David T
authors.initials: DT
authors.lastname: Allen
authors.forename: Jean-Philippe
authors.initials: JP
authors.lastname: Laurent
authors.forename: David E
authors.initials: DE
authors.lastname: Dyer
mesh_terms: D000397:Air Pollution / Q000517:prevention & control*; D003246:Conservation of Energy Resources; D004864:Equipment and Supplies; D005160:Facility Design and Construction; D005544:Forecasting; D008420:Manufactured Materials; D017146:Models, Organizational; D012666:Semiconductors; D013597:Systems Analysis