title: Localized self-volume growth in hybrid sol-gel glass induced by ultraviolet radiation with a gray-scale mask.
abstract: UV-induced self-volume growth of the hybrid sol-gel glass was investigated for fabrication of an arbitrary-surface relief structure with a user-defined gray scale mask. The gray scale mask was generated through exposure of a high-energy beam-sensitive glass under an electron beam. Saw-tooth gratings of different periods were fabricated by a simple UV exposure through the gray-scale mask. Experimental results showed that the smaller the period is, the shallower the depth obtained owing to the self-volume growth effect is.
authors.affiliation: Photonics Research Centre, School of Electrical and Electronic Engineering, Nanyang Technological University, Singapore 639798.
authors.forename: Weixing
authors.initials: W
authors.lastname: Yu
authors.forename: Xiaocong
authors.initials: X
authors.lastname: Yuan