title: Mesoporous silicates prepared using preorganized templates in supercritical fluids.
abstract: Well-ordered mesoporous silicate films were prepared by infusion and selective condensation of silicon alkoxides within microphase-separated block copolymer templates dilated with supercritical carbon dioxide. Confinement of metal oxide deposition to specific subdomains of the preorganized template yields high-fidelity, three-dimensional replication of the copolymer morphology, enabling the preparation of structures with multiscale order in a process that closely resembles biomineralization. Ordered mesoporous silicate films were synthesized with dielectric constants as low as 1.8 and excellent mechanical properties. The films survive the chemical-mechanical polishing step required for device manufacturing.
authors.affiliation: Department of Chemical Engineering, University of Massachusetts, Amherst, MA 01003, USA.
authors.forename: Rajaram A
authors.initials: RA
authors.lastname: Pai
authors.forename: Raashina
authors.initials: R
authors.lastname: Humayun
authors.forename: Michelle T
authors.initials: MT
authors.lastname: Schulberg
authors.forename: Archita
authors.initials: A
authors.lastname: Sengupta
authors.forename: Jia-Ning
authors.initials: JN
authors.lastname: Sun
authors.forename: James J
authors.initials: JJ
authors.lastname: Watkins