Nanoanalysis by a high-resolution energy filtering transmission electron microscope.
An energy-filtering transmission electron microscope with 300 kV acceleration voltage was developed and the spatial resolution of elemental distribution images was improved. Observing oxygen monolayers in Al(11)O(3)N(9), it was shown that the actual resolution attained is up to 0.5 nm. Surface plasmon loss images of silver particles were taken with a resolution of better than 0.4 nm. Furthermore, the sensitivity is sufficiently high to distinguish indium content differences of 2.5 atomic percent in In(x)Al(1-x)As. This performance is good enough to analyze elemental distribution with atomic-level resolution. Furthermore, since analysis with the energy-filtering microscope is easy and practical, nanoanalysis may come into wide use not only in academic fields but also in industry.
Mitome
Masanori
M
Advanced Materials Laboratory, National Institute for Materials Science, Ibaraki 305-0044, Japan. MITOME.Masanori@nims.go.jp
Bando
Yoshio
Y
Golberg
Dmitri
D
Kurashima
Keiji
K
Okura
Yoshihiro
Y
Kaneyama
Toshikatsu
T
Naruse
Mikio
M
Honda
Yoshiaki
Y