title: Measurement of random processes at rough surfaces with digital speckle correlation.
abstract: We present a detailed investigation of digital speckle correlation to measure small changes in the microstructure of random rough surfaces. The corresponding alterations in the scattered-light field are recorded by an electronic camera with subsequent numerical correlation. Among the classical theoretical approaches to describe the scattering at random rough surfaces, the composite-roughness model is advanced to calculate the speckle correlation in terms of parameters of the changes in surface microstructure. For an experimental verification, surfaces with similar microstructure are fabricated with a photolithographic technique. They are employed for comparative measurements with high-resolution scanning force microscopy and for correlation measurements under variation of experimental parameters. A good agreement between theoretically predicted and experimental correlation data can be observed. The results allow a quantitative whole-field monitoring of surface processes by remote optical means.
authors.affiliation: Applied Optics Group, Department of Physics, Carl von Ossietzky Universität Oldenburg, 26111 Oldenburg, Germany. tfb@llg.gwdg.de
authors.forename: Thomas
authors.initials: T
authors.lastname: Fricke-Begemann
authors.forename: Klaus D
authors.initials: KD
authors.lastname: Hinsch