title: Inorganic acid emission factors of semiconductor manufacturing processes.
mesh_terms: D000143:Acids / Q000032:analysis*; D000393:Air Pollutants / Q000032:analysis*; D004784:Environmental Monitoring; D007221:Industry; D007287:Inorganic Chemicals / Q000032:analysis; D012666:Semiconductors; D013624:Taiwan
chemical_list: D000143:Acids; D000393:Air Pollutants; D007287:Inorganic Chemicals