rf Electrode sheath formation near a concave electrode.
In this work we present experimental results concerning electrode sheath and ion flux formation near a concave electrode with the dimension of a cavity comparable to the electrode sheath length. It is shown that the secondary electron emission can play a crucial role in plasma molding over the electrode surface. It is also observed that plasma has a tendency to "self-leakage" in electrode cavities.
Orlov
K E
KE
Plasma Physics Department, St. Petersburg State Polytechnical University, Polytechnicheskaya 29, St. Petersburg 195251, Russia.
Malik
D A
DA
Chernoiziumskaya
T V
TV
Smirnov
A S
AS