Generalized method for wave-front analysis.
We suggest and demonstrate a new method for wave-front analysis based on common-path phase-shift interferometry. We introduce a formalism and an iterative mathematical algorithm in which the wave front is transformed, modified, and inversely transformed. The resulting intensity data are sufficient to reconstruct the entire wave front. In a more restricted case, in which the wave-front modifications are arbitrarily applied over arbitrary spatial regions of the wave front, the wave front is reconstructed semianalytically by use of a model that allows a local solution, followed by an iterative algorithm. Measurement results indicating that the suggested approach has an improved measurement accuracy with respect to existing quantitative phase measurement methods are presented.
Wolfling
Shay
S
Nano-Or Technologies, Yodfat 1, Lod 71291, Israel. shayw@nano-or.com
Ben-Yosef
Nissim
N
Arieli
Yoel
Y