Generalized method for wave-front analysis.
We suggest and demonstrate a new method for wave-front analysis based on common-path phase-shift interferometry. We introduce a formalism and an iterative mathematical algorithm in which the wave front is transformed, modified, and inversely transformed. The resulting intensity data are sufficient to reconstruct the entire wave front. In a more restricted case, in which the wave-front modifications are arbitrarily applied over arbitrary spatial regions of the wave front, the wave front is reconstructed semianalytically by use of a model that allows a local solution, followed by an iterative algorithm. Measurement results indicating that the suggested approach has an improved measurement accuracy with respect to existing quantitative phase measurement methods are presented.
Nano-Or Technologies, Yodfat 1, Lod 71291, Israel. shayw@nano-or.com
Shay
S
Wolfling
Nissim
N
Ben-Yosef
Yoel
Y
Arieli