A different regime of nanostructured diamond film growth.
A different regime of diamond growth was found out in microwave plasma chemical vapor deposition by applying a different combination of growth conditions (pressure, microwave power, bias voltage, and bias current). This different regime of growth was identified by high-resolution transmission electron microscopy. In this regime, at lower bias current density (BCD), nanocrystals of diamond were confined in a form of nano-diamond rods 10-30 nm in diameter and several hundred nanometers long. More interestingly, at relatively high BCD, the film consists of a high packing density of even smaller size (2-5 nm) of diamond that generates enormous stress in thin film. Our finding of this different regime of growth offers the promise of exploring new properties of carbon materials.
Seki Technotron Corporation, Tokyo 135-0042, Japan.
Tarun
T
Sharda
Tetsuo
T
Soga
D000327:Adsorption; D018130:Diamond / Q000737:chemistry*; D005740:Gases / Q000737:chemistry; D006244:Hardness; D008422:Materials Testing; D008872:Microwaves; D008968:Molecular Conformation; D036103:Nanotechnology / Q000379:methods*; D043942:Nanotubes / Q000737:chemistry* / Q000528:radiation effects / Q000648:ultrastructure*; D010316:Particle Size; D011312:Pressure; D013314:Stress, Mechanical; D013499:Surface Properties
D005740:Gases; D018130:Diamond