A different regime of nanostructured diamond film growth.
A different regime of diamond growth was found out in microwave plasma chemical vapor deposition by applying a different combination of growth conditions (pressure, microwave power, bias voltage, and bias current). This different regime of growth was identified by high-resolution transmission electron microscopy. In this regime, at lower bias current density (BCD), nanocrystals of diamond were confined in a form of nano-diamond rods 10-30 nm in diameter and several hundred nanometers long. More interestingly, at relatively high BCD, the film consists of a high packing density of even smaller size (2-5 nm) of diamond that generates enormous stress in thin film. Our finding of this different regime of growth offers the promise of exploring new properties of carbon materials.
Sharda
Tarun
T
Seki Technotron Corporation, Tokyo 135-0042, Japan.
Soga
Tetsuo
T
D000327:Adsorption; D018130:Diamond / Q000737:chemistry*; D005740:Gases / Q000737:chemistry; D006244:Hardness; D008422:Materials Testing; D008872:Microwaves; D008968:Molecular Conformation; D036103:Nanotechnology / Q000379:methods*; D043942:Nanotubes / Q000737:chemistry* / Q000528:radiation effects / Q000648:ultrastructure*; D010316:Particle Size; D011312:Pressure; D013314:Stress, Mechanical; D013499:Surface Properties
D005740:Gases; D018130:Diamond