The determination of local structural units in amorphous SiBN(3)C by means of X-ray photoelectron and X-ray absorption spectroscopy.
X-ray photoelectron spectroscopy (XPS) and X-ray absorption near edge structure (XANES) spectroscopy at the K-edge of Si, N, and B are presented as techniques suited to determine structural units in amorphous SiBN(3)C. The measurements reported give evidence for the presence of tetrahedral (SiN(4))- and planar (BN(3))-groups. It is concluded that these structural elements dominate the atomic surroundings of B and Si, respectively. From the spectroscopic results we conclude that C is mainly bonded to N and is not present as a pure carbide.
Franke
R
R
Physikalisches Institut, Universität Bonn, Nussallee 12, D-53115, Bonn, Germany.
Bender
S
S
Arzberger
I
I
Hormes
J
J
Jansen
M
M
Jüngermann
H
H
Löffelholz
J
J