title: Modelling of the radiated field from multi-element capacitive micromachined ultrasonic transducers.
abstract: This paper presents results from a theoretical model of the ultrasonic fields radiated by a 3x3 assembly of capacitive micromachined ultrasonic transducer (cMUT) sources on the same silicon substrate. These predictions have, for the first time, been compared directly to the fields measured experimentally using a scanned miniature detector. This work indicates that there is minimal cross-coupling between source elements, and demonstrates that it is possible to predict successfully the field characteristics of various geometries of such cMUT elements, with a view to the development of future imaging systems.
authors.affiliation: School of Engineering, University of Warwick, Coventry CV4 7AL, UK.
authors.forename: J S
authors.initials: JS
authors.lastname: McIntosh
authors.forename: A
authors.initials: A
authors.lastname: Neild
authors.forename: D A
authors.initials: DA
authors.lastname: Hutchins
authors.forename: D R
authors.initials: DR
authors.lastname: Billson
authors.forename: R A
authors.initials: RA
authors.lastname: Noble
authors.forename: R R
authors.initials: RR
authors.lastname: Davies