Electrochemical lithography: fabrication of nanoscale Si tips by porous anodization of Al/Si wafer.
Porous anodization of Al/Si wafer in sulfuric acid results in the formation of Si nanotips on the surface of Si substrate with ultrahigh packing density.
Pu
L
L
Department of Physics, Nanjing University, Nanjing 210093, China. pulin@nju.edu.cn
Shi
Y
Y
Zhu
J M
JM
Bao
X M
XM
Zhang
R
R
Zheng
Y D
YD