title: Characteristic temperatures and electron number densities in an R.F. capacitively coupled plasma.
abstract: The excitation temperatures of Ar and Fe, the ionization temperatures of Ar and Ca and the electron number densities have been determined for a radiofrequency capacitively coupled plasma in the tip-ring electrode geometry. The temperatures and the electron number densities possess their maximum value close to the electrodes.
authors.affiliation: Physics Department, University of Cluj, 3400, Cluj-Napoca, Romania.
authors.forename: S D
authors.initials: SD
authors.lastname: Anghel
authors.forename: T
authors.initials: T
authors.lastname: Frentiu
authors.forename: E
authors.initials: E
authors.lastname: Darvasi
authors.forename: A M
authors.initials: AM
authors.lastname: Rusu
authors.forename: A
authors.initials: A
authors.lastname: Simon
authors.forename: E A
authors.initials: EA
authors.lastname: Cordos