title: Quantitative analysis of thin films of RBa(2)Cu(3)O(7-x) (R-rare earth elements) and ZrO(2) (Y(2)O(3)) buffer layers by SNMS.
abstract: It is shown that RBa(2)Cu(3)O(7-X) single crystals may be used as reference samples for the quantitative analysis of RBa(2)Cu(3)O(7-X) thin films by SNMS. RSF-values for Y and Cu (relative to Ba) determined for ceramic RBa(2)Cu(3)O(7-X) samples are higher than those for single crystals. This difference may be caused by Ba segregation on grain boundaries. The depth profile analysis of YSZ/Al(2)O(3) samples was performed by DBM using a Ni grid to prevent sample charging. The reproducibility of analysis was better than 10%.
authors.affiliation: Chemistry Department, Moscow State University, 119899, Moscow, Russia.
authors.forename: J A
authors.initials: JA
authors.lastname: Rebane
authors.forename: A R
authors.initials: AR
authors.lastname: Kaul
authors.forename: Y D
authors.initials: YD
authors.lastname: Tretyakov