title: The determination of local structural units in amorphous SiBN(3)C by means of X-ray photoelectron and X-ray absorption spectroscopy.
abstract: X-ray photoelectron spectroscopy (XPS) and X-ray absorption near edge structure (XANES) spectroscopy at the K-edge of Si, N, and B are presented as techniques suited to determine structural units in amorphous SiBN(3)C. The measurements reported give evidence for the presence of tetrahedral (SiN(4))- and planar (BN(3))-groups. It is concluded that these structural elements dominate the atomic surroundings of B and Si, respectively. From the spectroscopic results we conclude that C is mainly bonded to N and is not present as a pure carbide.
authors.affiliation: Physikalisches Institut, Universität Bonn, Nussallee 12, D-53115, Bonn, Germany.
authors.forename: R
authors.initials: R
authors.lastname: Franke
authors.forename: S
authors.initials: S
authors.lastname: Bender
authors.forename: I
authors.initials: I
authors.lastname: Arzberger
authors.forename: J
authors.initials: J
authors.lastname: Hormes
authors.forename: M
authors.initials: M
authors.lastname: Jansen
authors.forename: H
authors.initials: H
authors.lastname: Jüngermann
authors.forename: J
authors.initials: J
authors.lastname: Löffelholz