About some pecularities of ionization in radio-frequency glow discharge (rfGD).
Two modes of rfGD formation were observed: intense and mild. In the mild mode mainly molecular peaks and large molecular fragments were observed and they were more abundant than with electron impact ionization. In the intense mode more molecular destruction was observed.
Kouzmin
A G
AG
Institute for Analytical Instrumentation, Rizhski 26, 198103, St.-Petersburg, Russia.
Gall
L N
LN
Muradimov
M Z
MZ