Characteristic temperatures and electron number densities in an R.F. capacitively coupled plasma.
The excitation temperatures of Ar and Fe, the ionization temperatures of Ar and Ca and the electron number densities have been determined for a radiofrequency capacitively coupled plasma in the tip-ring electrode geometry. The temperatures and the electron number densities possess their maximum value close to the electrodes.
Anghel
S D
SD
Physics Department, University of Cluj, 3400, Cluj-Napoca, Romania.
Frentiu
T
T
Darvasi
E
E
Rusu
A M
AM
Simon
A
A
Cordos
E A
EA