title: Tunable, oblique incidence resonant grating filter for telecommunications.
abstract: We have designed a tunable, oblique-incidence resonant grating filter that covers the C band as an add-drop device for incident TE-polarized light. We tune the filter by tilting a microelectromechanical systems platform onto which the filter is attached. The fabrication tolerances as well as the role of finite incident-beam size and limited device size were addressed. The maximum achievable efficiency of a finite-area device as well as a scaling law that relates the resonance peak width and the minimum device size is derived. In good agreement with simulations, measurements indicate a negligible change in shape of the resonance peak from 1526 nm at a 45 degrees angle of incidence to 1573 nm at a 53 degrees angle with a full width at half-maximum of 0.4 nm. In this range the shift of the peak wavelength is linear with respect to changes in the angle of incidence.
authors.affiliation: Institute of Microtechnology, Rue A.-L. Breguet 2, 2000 Neuchâtel, Switzerland. guido.niederer@unine.ch
authors.forename: Guido
authors.initials: G
authors.lastname: Niederer
authors.forename: Hans Peter
authors.initials: HP
authors.lastname: Herzig
authors.forename: Joseph
authors.initials: J
authors.lastname: Shamir
authors.forename: Hans
authors.initials: H
authors.lastname: Thiele
authors.forename: Marc
authors.initials: M
authors.lastname: Schnieper
authors.forename: Christian
authors.initials: C
authors.lastname: Zschokke