Microwave sputtering of conductors and insulators for optical emission and mass spectrometry.
A microwave-powered slab-line cavity was used to excite a discharge in low pressure argon or neon and to demonstrate the sputtering of conducting and non-conducting samples by a microwave excited discharge. Both optical emission spectroscopy and mass spectrometry were used as detection systems. The dependence of the signals on gas pressure and net microwave power was investigated.
Rümmeli
M H
MH
University of North London, Holloway Road, N7 8DB, London, UK.
Outred
M
M
Spillane
D E
DE
Steers
E B
EB