title: Microwave sputtering of conductors and insulators for optical emission and mass spectrometry.
abstract: A microwave-powered slab-line cavity was used to excite a discharge in low pressure argon or neon and to demonstrate the sputtering of conducting and non-conducting samples by a microwave excited discharge. Both optical emission spectroscopy and mass spectrometry were used as detection systems. The dependence of the signals on gas pressure and net microwave power was investigated.
authors.affiliation: University of North London, Holloway Road, N7 8DB, London, UK.
authors.forename: M H
authors.initials: MH
authors.lastname: Rümmeli
authors.forename: M
authors.initials: M
authors.lastname: Outred
authors.forename: D E
authors.initials: DE
authors.lastname: Spillane
authors.forename: E B
authors.initials: EB
authors.lastname: Steers