Optimization of an rf-powered magnetron glow discharge for the trace analysis of glasses and ceramics.
A radiofrequency (rf) powered planar magnetron glow discharge ion source has been designed and coupled to a double-focusing mass spectrometer. Superposition of the electrical field of the plasma in the cathode dark space and the magnetic field obtained from a ring-shaped magnet located directly behind the sample (cathode) form the electron traps and enhance the sputtering and ionization efficiency of the ion source. In order to establish optimum conditions for the trace analysis of nonconducting materials, mass spectrometric studies have been carried out on the ion signal intensities and energy distributions of analyte and discharge gas ions depending on pressure.
Saprykin
A I
AI
Zentralabteilung für Chemische Analysen, Forschungszentrum Jülich (GmbH), D-52425, Jülich, Germany.
Becker
J S
JS
Dietze
H J
HJ