title: On the use of grazing-incidence small-angle X-ray scattering (GISAXS) in the morphological study of ion-implanted materials.
abstract: Grazing-incidence small-angle X-ray scattering has become a widely used technique for the morphological analysis of surface systems. Here it is show how this technique can be applied to a buried system, like metallic clusters in glass obtained by ion implantation. The optimization of the data-collection geometry is described as well as the details of the quantitative data analysis. An experimental example on Cu + Au-implanted glasses shows the potentiality of the technique.
authors.affiliation: INFM, OGG, c/o ESRF, GILDA CRG, BP 220, F-38043 Grenoble, France. dcapito@esrf.fr
authors.forename: Francesco
authors.initials: F
authors.lastname: d'Acapito
authors.forename: Chiara
authors.initials: C
authors.lastname: Maurizio
authors.forename: Francesco
authors.initials: F
authors.lastname: Gonella
authors.forename: Elti
authors.initials: E
authors.lastname: Cattaruzza
authors.forename: Giovanni
authors.initials: G
authors.lastname: Mattei
authors.forename: Claudia
authors.initials: C
authors.lastname: Mondelli
authors.forename: Alessandro
authors.initials: A
authors.lastname: Longo
authors.forename: Antonino
authors.initials: A
authors.lastname: Martorana