On the use of grazing-incidence small-angle X-ray scattering (GISAXS) in the morphological study of ion-implanted materials.
Grazing-incidence small-angle X-ray scattering has become a widely used technique for the morphological analysis of surface systems. Here it is show how this technique can be applied to a buried system, like metallic clusters in glass obtained by ion implantation. The optimization of the data-collection geometry is described as well as the details of the quantitative data analysis. An experimental example on Cu + Au-implanted glasses shows the potentiality of the technique.
d'Acapito
Francesco
F
INFM, OGG, c/o ESRF, GILDA CRG, BP 220, F-38043 Grenoble, France. dcapito@esrf.fr
Maurizio
Chiara
C
Gonella
Francesco
F
Cattaruzza
Elti
E
Mattei
Giovanni
G
Mondelli
Claudia
C
Longo
Alessandro
A
Martorana
Antonino
A