title: Surface chemistry and tribology of MEMS.
abstract: The microscopic length scale and high surface-to-volume ratio, characteristic of microelectro-mechanical systems (MEMS), dictate that surface properties are of paramount importance. This review deals with the effects of surface chemical treatments on tribological properties (adhesion, friction, and wear) of MEMS devices. After a brief review of materials and processes that are utilized in MEMS technology, the relevant tribological and chemical issues are discussed. Various MEMS microinstruments are discussed, which are commonly employed to perform adhesion, friction, and wear measurements. The effects of different surface treatments on the reported tribological properties are discussed.
authors.affiliation: Department of Chemical Engineering, University of California, Berkeley, California 94720, USA. maboudia@socrates.berkeley.edu
authors.forename: Roya
authors.initials: R
authors.lastname: Maboudian
authors.forename: Carlo
authors.initials: C
authors.lastname: Carraro
mesh_terms: D001672:Biocompatible Materials; D001696:Biomechanical Phenomena; D004563:Electrochemistry; D004867:Equipment Design; D017276:Friction; D006244:Hardness; D008422:Materials Testing / Q000379:methods; D008904:Miniaturization; D012825:Silicon / Q000737:chemistry; D013499:Surface Properties; D000267:Tissue Adhesions
chemical_list: D001672:Biocompatible Materials; D012825:Silicon