Static and quasi-static calibration of a bio-MEMS device.
A bio-MEMS device that has been designed to stimulate cells by oscillatory actuation in the vertical direction has been calibrated. The displacement of this device was determined experimentally by a laser interferometer when actuated by a static voltage, and by an atomic force microsope when actuated quasi-statically at 0.1 Hz. Both experimental calibrations were compared to a simple model.
Slifka
A J
AJ
NIST, Boulder, CO 80305, USA.
Panchawagh
H
H
Mahajan
R L
RL
Finch
D
D
Rorrer
R A
RA
D002138:Calibration; D004548:Elasticity; D019544:Equipment Failure Analysis / Q000379:methods*; D007368:Interferometry / Q000379:methods*; D040542:Mechanotransduction, Cellular / Q000502:physiology*; D008846:Micromanipulation / Q000295:instrumentation* / Q000379:methods; D018625:Microscopy, Atomic Force / Q000379:methods*; D008904:Miniaturization; D010812:Physical Stimulation / Q000295:instrumentation*; D015203:Reproducibility of Results; D012680:Sensitivity and Specificity; D013314:Stress, Mechanical; D014159:Transducers; D014732:Vibration