Different modes of a capacitively coupled radio-frequency discharge in methane.
The transition between different regimes of a capacitevely coupled radio-frequency gas discharge in methane is studied with a combined particle-in-cell Monte Carlo collision algorithm over a wide range of gas pressure P and discharge current j. The results of this study are compared with known experimental and numerical results and summarized on a P-j phase diagram, which constitutes the areas of existence of different discharge regimes.
Schweigert
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Institute of Theoretical and Applied Mechanics, 630090 Novosibirsk, Russia. ischweig@itam.nsc.ru