Application of the dual-beam FIB/SEM to metals research.
The dual-beam microscope is a combination of a focused ion beam with an electron beam. The instrument used in this work is also equipped with an energy-dispersive X-ray system for local elemental analysis. This powerful tool gives access to specific features inside a material. Two different applications are presented in this paper: (1) cross-sections and transmission electron microscope specimens cut in order to investigate the interface between an aluminium substrate and its epoxy coating; and (2) a grain boundary in a Cu(3)Au alloy. In both cases, the dual beam succeeded where other methods failed.
Sivel
V G M
VG
Netherlands Institute for Metals Research, Rotterdamseweg 137, 2628 AL Delft, The Netherlands. V.G.M.sivel@tnw.tudelft.nl
Van den Brand
J
J
Wang
W R
WR
Mohdadi
H
H
Tichelaar
F D
FD
Alkemade
P F A
PF
Zandbergen
H W
HW