title: Thermal chip fabrication with arrays of sensors and heaters for micro-scale impingement cooling heat transfer analysis and measurements.
abstract: The design and fabrication for a thermal chip with an array of temperature sensors and heaters for study of micro-jet impingement cooling heat transfer process are presented. This thermal chip can minimize the heat loss from the system to the ambient and provide a uniform heat flux along the wall, thus local heat transfer processes along the wall can be measured and obtained. The fabrication procedure presented can reach a chip yield of 100%, and every one of the sensors and heaters on the chip is in good condition. In addition, micro-jet impingement cooling experiments are performed to obtain the micro-scale local heat transfer Nusselt number along the wall. Flow visualization for the micro-impinging jet is also made. The experimental results indicate that both the micro-scale impinging jet flow structure and the heat transfer process along the wall is significantly different from the case of large-scale jet impingement cooling process.
authors.affiliation: Institute of Aeronautics and Astronautics, National Cheng Kung University, Tainan 70101, Taiwan, ROC.
authors.forename: C H
authors.initials: CH
authors.lastname: Shen
authors.forename: C
authors.initials: C
authors.lastname: Gau
mesh_terms: D003080:Cold Temperature; D004867:Equipment Design; D019544:Equipment Failure Analysis; D017022:Flow Injection Analysis / Q000295:instrumentation* / Q000379:methods; D006361:Heating / Q000295:instrumentation* / Q000379:methods; D006358:Hot Temperature; D046210:Microfluidic Analytical Techniques / Q000295:instrumentation* / Q000379:methods; D015203:Reproducibility of Results; D012680:Sensitivity and Specificity; D013814:Thermal Conductivity; D013817:Thermography / Q000295:instrumentation* / Q000379:methods; D014159:Transducers