title: Organic plasma process for simple and substrate-independent surface modification of polymeric BioMEMS devices.
abstract: A polymeric bio micro electromechanical systems (BioMEMS) device was fabricated using organic plasma polymerization, by which the surface of a polymeric substrate could easily be modified through vapor-phase deposition of organic thin films. This technique, capable of polymeric deposition of any kind of monomer, can serve the purpose of anti-fouling coating, wettability control, or layer-to-layer interface creation, on the surface of any given chemically-inert polymeric substrate without involving cumbersome surface organic reactions. A prototype device was fabricated to have an array of electrochemical glucose biosensors with the three electrode configuration, each of which has a microfluidic channel (500 microm x 800 microm) for capillary-action-driven sample delivery and the concerned enzymatic reaction. Stressing the advantages of the plasma polymerization process using a polymeric substrate together with some additional features accomplished in our device fabrication, new possibilities in the field of polymeric BioMEMS are discussed.
authors.affiliation: Matsushita Electric Industrial, 3-1-1Yagumonakamachi, Moriguchi-shi, Osaka 570-8501, Japan.
authors.forename: Atsunori
authors.initials: A
authors.lastname: Hiratsuka
authors.forename: Hitoshi
authors.initials: H
authors.lastname: Muguruma
authors.forename: Kyong-Hoon
authors.initials: KH
authors.lastname: Lee
authors.forename: Isao
authors.initials: I
authors.lastname: Karube
mesh_terms: D015374:Biosensing Techniques / Q000295:instrumentation* / Q000379:methods; D004563:Electrochemistry / Q000295:instrumentation* / Q000379:methods; D004800:Enzymes, Immobilized / Q000737:chemistry; D004867:Equipment Design / Q000379:methods; D019544:Equipment Failure Analysis; D017022:Flow Injection Analysis / Q000295:instrumentation* / Q000379:methods; D005740:Gases / Q000737:chemistry; D005947:Glucose / Q000032:analysis* / Q000737:chemistry*; D005949:Glucose Oxidase / Q000737:chemistry*; D006358:Hot Temperature; D046210:Microfluidic Analytical Techniques / Q000295:instrumentation* / Q000379:methods; D009930:Organic Chemicals / Q000737:chemistry; D011108:Polymers / Q000737:chemistry; D019904:Polymethyl Methacrylate / Q000737:chemistry; D013379:Substrate Specificity; D013499:Surface Properties
chemical_list: D004800:Enzymes, Immobilized; D005740:Gases; D009930:Organic Chemicals; D011108:Polymers; D019904:Polymethyl Methacrylate; D005949:Glucose Oxidase; D005947:Glucose