Characterization of the signature of subwavelength variation from far-field irradiance.
The dynamic signature of the subwavelength variation of a slit is shown to be determinable from far-field irradiance with a precision of better than 1 nm. One can increase the efficiency of measurement of the subwavelength's signature by adjusting the detection width over which the subwavelength variation is detected. The subwavelength variation of a rectangular aperture was also examined to show the general feasibility.
Chu
Shu-Chun
SC
Institute of Electro-Optical Engineering, Microelectronics and Information System Research Center, National Chiao Tung University, Hsinchu 300, Taiwan. scchu.eo92g@nctu.edu.tw
Chern
Jyh-Long
JL