title: Microelectrode array fabrication by electrical discharge machining and chemical etching.
abstract: Wire electrical discharge machining (EDM), with a complementary chemical etching process, is explored and assessed as a method for developing microelectrode array assemblies for intracortically recording brain activity. Assembly processes based on these methods are highlighted, and results showing neural activity successfully recorded from the brain of a mouse using an EDM-based device are presented. Several structures relevant to the fabrication of microelectrode arrays are also offered in order to demonstrate the capabilities of EDM.
authors.affiliation: BioInstrumentation Laboratory, Department of Mechanical Engineering, Massachusetts Institute of Technology, Cambridge, MA 02139, USA. fofonoff@mit.edu
authors.forename: Timothy A
authors.initials: TA
authors.lastname: Fofonoff
authors.forename: Sylvain M
authors.initials: SM
authors.lastname: Martel
authors.forename: Nicholas G
authors.initials: NG
authors.lastname: Hatsopoulos
authors.forename: John P
authors.initials: JP
authors.lastname: Donoghue
authors.forename: Ian W
authors.initials: IW
authors.lastname: Hunter
mesh_terms: D000200:Action Potentials / Q000502:physiology; D000818:Animals; D002540:Cerebral Cortex / Q000502:physiology*; D004563:Electrochemistry / Q000379:methods; D004567:Electrodes, Implanted; D004867:Equipment Design; D019544:Equipment Failure Analysis; D008420:Manufactured Materials; D051379:Mice; D008839:Microelectrodes; D036103:Nanotechnology / Q000295:instrumentation* / Q000379:methods; D009415:Nerve Net / Q000502:physiology*; D009474:Neurons / Q000502:physiology*