p-type macroporous silicon having three-dimensional structure.
Macroporous silicon with three-dimensional structure was fabricated using organic-based electrolyte, dimethylformamide (DMF), in the p-type silicon. The obtained three-dimensional macroporous structures grew wholly along the <100> orientation of the p-type silicon wafer.
Lee
Sung-Ho
SH
National Institute of Advanced Industrial Science and Technology, 1-2 Namiki, Tsukuba, Ibaraki 305-8564, Japan. sungho-lee@aist.go.jp
Maeda
Ryutaro
R