Fabrication and analysis of a Fabry-Perot cavity with a micromechanical wet-etching process.
We present a novel low-cost and batch fabrication method to fabricate a Fabry-Perot (FP) cavity with a micromechanical wet-etching process, through which FP cavities can be achieved with a cavity length of from several micrometers to tens of micrometers. The parallelism of mirror elements can be well achieved without electrostatic control. The quality of an etched surface can be greatly improved by the oxidation polish process. FP cavities with a finesse of approximately 50 are achieved. Analysis shows that the effective finesse is dominated mainly by the quality of the etched surface.
Xiang
Min
M
State Key Laboratories of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, 865 Changning Road, Shanghai 200050, China. mxiang@mail.sim.ac.cn
Cai
Yan Min
YM
Wu
Ya Ming
YM
Yang
Jian Yi
JY
Wang
Yue Lin
YL