Image quality improvement in a hard X-ray projection microscope using total reflection mirror optics.
A new figure correction method has been applied in order to fabricate an elliptical mirror to realize a one-dimensionally diverging X-ray beam having high image quality. Mutual relations between figure errors and intensity uniformities of diverging X-ray beams have also been investigated using a wave-optical simulator and indicate that figure errors in relatively short spatial wavelength ranges lead to high-contrast interference fringes. By using a microstitching interferometer and elastic emission machining, figure correction of an elliptical mirror with a lateral resolution close to 0.1 mm was carried out. A one-dimensional diverging X-ray obtained using the fabricated mirror was observed at SPring-8 and evaluated to have a sufficiently flat intensity distribution.
Mimura
Hidekazu
H
Department of Precision Science and Technology, Osaka University, Yamada-Oka 2-1, Suita, Osaka 565-0871, Japan. mimura@prec.eng.osaka-u.ac.jp
Yamauchi
Kazuto
K
Yamamura
Kazuya
K
Kubota
Akihisa
A
Matsuyama
Satoshi
S
Sano
Yasuhisa
Y
Ueno
Kazumasa
K
Endo
Katsuyoshi
K
Nishino
Yoshinori
Y
Tamasaku
Kenji
K
Yabashi
Makina
M
Ishikawa
Tetsuya
T
Mori
Yuzo
Y
D004867:Equipment Design; D019544:Equipment Failure Analysis; D008853:Microscopy / Q000295:instrumentation* / Q000379:methods*; D055095:Optics and Photonics / Q000295:instrumentation*; D015203:Reproducibility of Results; D012680:Sensitivity and Specificity; D014965:X-Rays