First data from a commercial local electrode atom probe (LEAP).
The first dedicated local electrode atom probes (LEAP [a trademark of Imago Scientific Instruments Corporation]) have been built and tested as commercial prototypes. Several key performance parameters have been markedly improved relative to conventional three-dimensional atom probe (3DAP) designs. The Imago LEAP can operate at a sustained data collection rate of 1 million atoms/minute. This is some 600 times faster than the next fastest atom probe and large images can be collected in less than 1 h that otherwise would take many days. The field of view of the Imago LEAP is about 40 times larger than conventional 3DAPs. This makes it possible to analyze regions that are about 100 nm diameter by 100 nm deep containing on the order of 50 to 100 million atoms with this instrument. Several example applications that illustrate the advantages of the LEAP for materials analysis are presented.
Kelly
Thomas F
TF
Imago Scientific Instruments Corporation, 6300 Enterprise Lane, Madison, WI 53719-1193, USA. tkelly@imago.com
Gribb
Tye T
TT
Olson
Jesse D
JD
Martens
Richard L
RL
Shepard
Jeffrey D
JD
Wiener
Scott A
SA
Kunicki
Thomas C
TC
Ulfig
Robert M
RM
Lenz
Daniel R
DR
Strennen
Eric M
EM
Oltman
Edward
E
Bunton
Joseph H
JH
Strait
David R
DR
D000497:Alloys / Q000737:chemistry*; D000535:Aluminum / Q000032:analysis; D002857:Chromium / Q000032:analysis; D003035:Cobalt / Q000032:analysis; D004577:Electron Probe Microanalysis / Q000295:instrumentation / Q000379:methods; D007501:Iron; D036103:Nanotechnology / Q000379:methods*; D009532:Nickel / Q000032:analysis; D012666:Semiconductors
D000497:Alloys; D002857:Chromium; D003035:Cobalt; D009532:Nickel; D000535:Aluminum; D007501:Iron