In situ lift-out using a FIB-SEM system.
An in situ 'lift-out' technique for preparing transmission electron microscopy specimens, which is performed using secondary electron imaging within the chamber of a focused ion beam-SEM system is presented. The main advantage of this in situ approach, relative to the ex situ lift-out technique, is that secondary electron imaging enables higher magnifications to be used than is possible with optical microscopy. This makes the lift-out procedure more controllable and thus increases the overall success rate especially for inexperienced users. The technique is also compared with another in situ lift-out approach, the 'wedge' technique.
Langford
R M
RM
SFI Trinity Nanoscience Laboratory, Department of Physics, Trinity College Dublin, Dublin 2, Ireland. richard.langford@tcd.ie
Clinton
C
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