title: Miniature lamellar grating interferometer based on silicon technology.
abstract: We present a lamellar grating interferometer realized with microelectromechanical system technology. It is used as a time-scanning Fourier-transform spectrometer. The motion is carried out by an electrostatic comb drive actuator fabricated by silicon micromachining, particularly by silicon-on-insulator technology. For the first time to our knowledge, we measure the spectrum of an extended white-light source with a resolution of 1.6 nm at a wavelength of 400 nm and of 5.5 nm at 800 nm. The wavelength accuracy is better than 0.5 nm, and the inspected wavelength range extends from 380 to 1100 nm. The optical path difference maximum is 145 microm. The dimensions of the device are 5 mm x 5 mm.
authors.affiliation: Institute of Microtechnology, University of Neuchâtel, Breguet 2, 2000 Neuchâtel, Switzerland. omar.manzardo@unine.ch
authors.forename: Omar
authors.initials: O
authors.lastname: Manzardo
authors.forename: Roland
authors.initials: R
authors.lastname: Michaely
authors.forename: Felix
authors.initials: F
authors.lastname: Schädelin
authors.forename: Wilfried
authors.initials: W
authors.lastname: Noell
authors.forename: Thomas
authors.initials: T
authors.lastname: Overstolz
authors.forename: Nico
authors.initials: N
authors.lastname: De Rooij
authors.forename: Hans Peter
authors.initials: HP
authors.lastname: Herzig