title: A compact mirror manipulator in the SRRC beamline.
abstract: A compact mirror manipulator which has high stiffness and is easily adjustable has been developed for new beamlines at SRRC. It consists of a vertical stem to support the mirror and allows for six-axis precise positioning. The rotation adjustment is designed with a minimum of cross-coupling between adjustments. An independent support is fixed to the ground to reduce vibration from the chamber and the pump. Some performance test results in vacuum and in atmosphere, including vibration, repeatability, long-term drift etc., are described in this paper.
authors.affiliation: Synchrotron Radiation Research Center, No.1 R&D Road VI, Hsinchu Science-Based Industrial Park, Hsinchu 30077, Taiwan.
authors.forename: D J
authors.initials: DJ
authors.lastname: Wang
authors.forename: T C
authors.initials: TC
authors.lastname: Tseng
authors.forename: S Y
authors.initials: SY
authors.lastname: Perng
authors.forename: C K
authors.initials: CK
authors.lastname: Kuan
authors.forename: J R
authors.initials: JR
authors.lastname: Chen
authors.forename: C T
authors.initials: CT
authors.lastname: Chen