High-resolution X-ray topographic images of dislocations in a silicon crystal recorded using an X-ray zooming tube.
A Be-window-type X-ray zooming tube is an X-ray digital imaging system whose magnification factor of X-ray images can be easily varied from 10 to 200, and whose spatial resolution is less than 0.5 micro m. This zooming tube was used as an imaging detector in double-crystal X-ray topography to obtain high-resolution images of dislocations in a silicon crystal. X-ray interference images of about 5 micro m were observed even though optimal performance of the X-ray zooming tube could not be achieved. The results indicate that the X-ray zooming tube might make a good detector for X-ray topography with minor improvements in its stage structure.
Kimura
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Silicon Systems Research Laboratories, NEC Corporation, 34 Miyukigaoka, Tsukuba, Ibaraki 305, Japan.
Matsumura
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Kinoshita
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Hirano
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Kihara
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