title: The Soft X-ray Scanning Photoemission Microscopy Project at SRRC.
abstract: The Synchrotron Radiation Research Center (SRRC) and the Institute of Atomic and Molecular Sciences (IAMS) have initiated a project to construct a scanning photoelectron spectromicroscopy end station at SRRC (SRRC-SPEM). High-brightness soft X-rays will be provided by the U5 undulator beamline. Zone-plate-based soft X-ray optics will be used to focus the beam to form the microprobe. A hemispherical sector analyser with multichannel detection capability will collect the photoelectrons. A total of up to 32 images can be acquired concurrently. The apparatus is also equipped with a sample distribution system for in situ sample preparation and characterization in conjunction with other surface spectroscopic techniques.
authors.affiliation: Synchrotron Radiation Research Center, No. 1 R&D Road VI, Hsinchu Science-Based Industrial Park, Hsinchu 30077, Taiwan.
authors.forename: C H
authors.initials: CH
authors.lastname: Ko
authors.forename: R
authors.initials: R
authors.lastname: Klauser
authors.forename: D H
authors.initials: DH
authors.lastname: Wei
authors.forename: H H
authors.initials: HH
authors.lastname: Chan
authors.forename: T J
authors.initials: TJ
authors.lastname: Chuang