title: Cryogenic high-resolution X-ray spectrometers for SR-XRF and microanalysis.
abstract: Experimental results are presented obtained with a cryogenically cooled high-resolution X-ray spectrometer based on a 141 x 141 micro m Nb-Al-Al(2)O(3)-Al-Nb superconducting tunnel junction (STJ) detector in an SR-XRF demonstration experiment. STJ detectors can operate at count rates approaching those of semiconductor detectors while still providing a significantly better energy resolution for soft X-rays. By measuring fluorescence X-rays from samples containing transition metals and low-Z elements, an FWHM energy resolution of 6-15 eV for X-rays in the energy range 180-1100 eV has been obtained. The results show that, in the near future, STJ detectors may prove very useful in XRF and microanalysis applications.
authors.affiliation: Lawrence Livermore National Laboratory, PO Box 808, L-418, Livermore, CA 94551, USA.
authors.forename: M
authors.initials: M
authors.lastname: Frank
authors.forename: C A
authors.initials: CA
authors.lastname: Mears
authors.forename: S E
authors.initials: SE
authors.lastname: Labov
authors.forename: L J
authors.initials: LJ
authors.lastname: Hiller
authors.forename: J B
authors.initials: JB
authors.lastname: Le Grand
authors.forename: M A
authors.initials: MA
authors.lastname: Lindeman
authors.forename: H
authors.initials: H
authors.lastname: Netel
authors.forename: D
authors.initials: D
authors.lastname: Chow
authors.forename: A T
authors.initials: AT
authors.lastname: Barfknecht