title: Characterization of substrates for use in X-ray multilayer optics.
abstract: The optical performance of platinum-carbon multilayers deposited onto different substrates has been examined. Specular reflectivity and non-specular diffuse scattering were measured to study the replication of substrate roughness into the multilayer structure. Surface topography was measured before and after deposition using a scanning probe microscope and a mechanical profiler.
authors.affiliation: Department of Physics, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8602, Japan.
authors.forename: G S
authors.initials: GS
authors.lastname: Lodha
authors.forename: K
authors.initials: K
authors.lastname: Yamashita
authors.forename: K
authors.initials: K
authors.lastname: Haga
authors.forename: H
authors.initials: H
authors.lastname: Kunieda
authors.forename: N
authors.initials: N
authors.lastname: Nakajo
authors.forename: N
authors.initials: N
authors.lastname: Nakamura
authors.forename: K
authors.initials: K
authors.lastname: Tamura
authors.forename: Y
authors.initials: Y
authors.lastname: Tawara
authors.forename: J M
authors.initials: JM
authors.lastname: Bennett
authors.forename: J
authors.initials: J
authors.lastname: Yu
authors.forename: Y
authors.initials: Y
authors.lastname: Namba