Characterization of substrates for use in X-ray multilayer optics.
The optical performance of platinum-carbon multilayers deposited onto different substrates has been examined. Specular reflectivity and non-specular diffuse scattering were measured to study the replication of substrate roughness into the multilayer structure. Surface topography was measured before and after deposition using a scanning probe microscope and a mechanical profiler.
Lodha
G S
GS
Department of Physics, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8602, Japan.
Yamashita
K
K
Haga
K
K
Kunieda
H
H
Nakajo
N
N
Nakamura
N
N
Tamura
K
K
Tawara
Y
Y
Bennett
J M
JM
Yu
J
J
Namba
Y
Y