Diffraction-based solid immersion lens.
A solid immersion lens based on diffraction (dSIL) is proposed as an alternative to the conventional design based on refraction. A design analogous to a Fresnel zone plate is derived in accordance with the Huygens-Fresnel principle. Fabrication of a binary dSIL is achieved by electron-beam lithography and reactive-ion etching on LaSF35, with index n = 2.014. Measurement of the point-spread function is performed with near-field optical microscopy. The results are in accord with the expected resolution enhancement of a factor n with respect to the diffraction limit.
Brunner
Robert
R
Carl Zeiss Jena GmbH, Carl-Zeiss-Promenade 10, 07745 Jena, Germany. rbrunner@zeiss.de
Burkhardt
Matthias
M
Pesch
Alexander
A
Sandfuchs
Oliver
O
Ferstl
Margit
M
Hohng
Sungchul
S
White
Jeffrey O
JO