Improved surface chemistries, thin film deposition techniques, and stamp designs for nanotransfer printing.
Nanotransfer printing represents an additive approach for patterning thin layers of solid materials with nanometer resolution. The surface chemistries, thin film deposition techniques, and stamp designs are all important for the proper operation of this method. This paper presents some details concerning processing procedures and other considerations needed for patterning two- and three-dimensional nanostructures with low density of defects and minimal distortions.
Department of Materials Science and Engineering, University of Illinois at Urbana/Champaign, Illinois 61801, USA.
Etienne
E
Menard
Lise
L
Bilhaut
Jana
J
Zaumseil
John A
JA
Rogers