High-accuracy measurement of the optical transmittance of optical bulk materials at deep-ultraviolet wavelengths.
A measurement setup that is capable of measuring the internal transmittance of fused-silica prisms at 193 nm with a precision better than 0.01%/cm (3sigma) is presented. Its application to materials and wavelengths other than those that were chosen here for demonstration is straightforward. A lack of any standards makes it impossible to determine the absolute accuracy (also called measurement uncertainty) experimentally; however, calculations indicate that it is almost within the same margin as the precision.
Corning, Incorporated, Corning, New York 14831, USA. neukirchu@corning.com
Ulrich
U
Neukirch
Xinghua
X
Li